Defect Reduction in Polycrystalline Silicon Thin Films at 150 °C
Sameshima, Toshiyuki, Mizutani, Yuta, Motai, Katsuyuki, Ichimura, Koji
Published in Japanese Journal of Applied Physics (01.03.2010)
Published in Japanese Journal of Applied Physics (01.03.2010)
Get full text
Journal Article
실란트, 실리콘 재료의 수송용 백 및 실리콘 재료의 곤포체
MOTAI KATSUYUKI, SATO KAZUSHI, NAKAJIMA HIROYOSHI, MIZOSHIRI MAKOTO, TACHIKAWA YUKA
Year of Publication 03.05.2022
Get full text
Year of Publication 03.05.2022
Patent