리소그래피 시스템과 같은 시스템의 예측 유지 보수를 수행하기 위하여 시스템을 모델링하는 방법
YPMA ALEXANDER, LANCIA CARLO, GANTAPARA ANJAN PRASAD, MOSSAVAT SEYED IMAN, KERNKAMP DIRK JAN
Year of Publication 05.10.2022
Get full text
Year of Publication 05.10.2022
Patent
증가된 대역폭을 갖는 계측 방법 및 장치
MOSSAVAT SEYED IMAN, HINNEN PAUL CHRISTIAAN, CRAMER HUGO AUGUSTINUS JOSEPH
Year of Publication 23.09.2020
Get full text
Year of Publication 23.09.2020
Patent
통합 회로 및 관련 장치의 제조 시에 측정값을 보정하기 위한 방법
MOSSAVAT SEYED IMAN, GEYPEN NIELS, SCHOLZ SANDY CLAUDIA, COTTAAR JEROEN, ROOBOL SANDER BAS, COENEN TEIS JOHAN, NIENHUYS HAN KWANG, PORTER CHRISTINA LYNN
Year of Publication 22.07.2022
Get full text
Year of Publication 22.07.2022
Patent
패터닝 공정 조정 방법
CASTELIJNS HENRICUS JOZEF, YPMA ALEXANDER, HLOD ANDRIY VASYLIOVICH, ZHANG YOUPING, GANTAPARA ANJAN PRASAD, MOSSAVAT SEYED IMAN, KHEDEKAR SATEJ SUBHASH, GUO CHAOQUN, LI ZHAOZE, GONZALEZ HUESCA JUAN MANUEL, STEINMEIER EWOUT KLAAS, HUBAUX ARNAUD, ZOU YI, BOLDER JOOST JOHAN, AARDEN FRANS BERNARD, BOND STEPHEN HENRY, LIN CHENXI, CHEN HONGWEI, VAN BERKEL KOOS, DICKER GERALD
Year of Publication 17.02.2023
Get full text
Year of Publication 17.02.2023
Patent
Methods and apparatus for metrology
Smorenburg, Petrus Wilhelmus, Mossavat, Seyed Iman, Coenen, Teis Johan
Year of Publication 04.05.2021
Get full text
Year of Publication 04.05.2021
Patent