Shallow donor generation in ZnO by remote hydrogen plasma
Strzhemechny, Yuri M., Mosbacker, Howard L., Goss, Stephen H., Look, David C., Reynolds, Donald C., Litton, Cole W., Garces, Nelson Y., Giles, Nancy C., Halliburton, Larry E., Niki, Shigeru, Brillson, Leonard J.
Published in Journal of electronic materials (01.04.2005)
Published in Journal of electronic materials (01.04.2005)
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Journal Article
Shallow donor generation in ZnO by remote hydrogen plasma: Special issue on SiC and the group III nitride semiconductors
STRZHEMECHNY, Yuri M, MOSBACKER, Howard L, BRILLSON, Leonard J, GOSS, Stephen H, LOOK, David C, REYNOLDS, Donald C, LITTON, Cole W, GARCES, Nelson Y, GILES, Nancy C, HALLIBURTON, Larry E, NIKI, Shigeru
Published in Journal of electronic materials (2005)
Get full text
Published in Journal of electronic materials (2005)
Journal Article