기판 영역에 걸쳐 측정 데이터를 모델링하는 방법 및 관련 장치
MOS EVERHARDUS CORNELIS, KATTOUW HANS ERIK, BRINKHOF RALPH, TEN HAAF GIJS
Year of Publication 12.04.2024
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Year of Publication 12.04.2024
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측정 데이터를 모델에 근사화하고 성능 파라미터 분포를 모델링하는 방법 및 연관된 장치
MOS EVERHARDUS CORNELIS, KEYVANI JANBAHAN ALIASGHAR, WILDENBERG JO SEBASTIAAN, SPIERING FRANS REINIER
Year of Publication 09.05.2022
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Year of Publication 09.05.2022
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공정 매개변수를 기반으로 기판을 라벨링하는 방법
YPMA ALEXANDER, MOS EVERHARDUS CORNELIS, LIN CHENXI, CEKLI HAKKI ERGUN, SONNTAG DAG, BASTANI VAHID
Year of Publication 01.09.2020
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Year of Publication 01.09.2020
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디바이스 제조 프로세스
MOS EVERHARDUS CORNELIS, MAHMOODI BARAM REZA, WEI XIUHONG, YAGUBIZADE HADI, SIMONS HUBERTUS JOHANNES GERTRUDUS, ZHANG YICHEN
Year of Publication 20.11.2019
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Year of Publication 20.11.2019
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Computational metrology
MOS EVERHARDUS CORNELIS, JUNGBLUT REINER MARIA, VAN RHEE PETRUS GERARDUS, SEGERS BART PETER BERT, SCHMITT WEAVER EMIL PETER, YU HYUN WOO, LIU XING LAN, TEL WIM TJIBBO, KILITZIRAKI MARIA, ZHANG YICHEN
Year of Publication 11.03.2022
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Year of Publication 11.03.2022
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리소그래피 프로세스의 최적화를 위한 방법 및 장치
MOS EVERHARDUS CORNELIS, YPMA ALEXANDER, HAUPTMANN MARC, KOU WEITIAN, YU HYUN WOO, HAN MIN SUB, KUPERS MICHIEL
Year of Publication 10.12.2019
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Year of Publication 10.12.2019
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A METHOD TO CHANGE AN ETCH PARAMETER
MOS EVERHARDUS CORNELIS, JENSEN ERIK, VAN DIJK LEON PAUL, URBANCZYK ADAM JAN, VAN HAREN RICHARD JOHANNES FRANCISCUS, WERKMAN ROY, WILDENBERG JO SEBASTIAAN, JOSEN MARINUS, RAJASEKHARAN BIJOY, CALADO VICTOR EMANUEL
Year of Publication 20.10.2021
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Year of Publication 20.10.2021
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METHOD FOR DETERMINING CONTRIBUTION TO A FINGERPRINT
WALLERBOS ERIK JOHANNES MARIA, LOOIJESTIJN HUGO THOMAS, THEEUWES THOMAS, STAALS FRANK, WERKMAN ROY, RIJNIERSE CORNELIS JOHANNES, MOS EVERHARDUS CORNELIS, WANG FUMING, JIA FEI, PISARENCO MAXIM, WILDENBERG JO SEBASTIAAN, HARUTYUNYAN DAVIT, VAN HEMERT TOM, BASTANI VAHID
Year of Publication 07.07.2021
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Year of Publication 07.07.2021
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패터닝 프로세스 오차를 정정하기 위한 방법 및 장치
MOS EVERHARDUS CORNELIS, JENSEN ERIK, TEN BERGE PETER, VAN HAREN RICHARD JOHANNES FRANCISCUS, WARDENIER PETER HANZEN
Year of Publication 22.06.2018
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Year of Publication 22.06.2018
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컴퓨테이션 계측법
MOS EVERHARDUS CORNELIS, SEGERS BART PETER BERT, STAALS FRANK, WARNAAR PATRICK, TINNEMANS PATRICIUS ALOYSIUS JACOBUS, GRZELA GRZEGORZ, JOSEN MARINUS, TEL WIM TJIBBO
Year of Publication 24.02.2020
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Year of Publication 24.02.2020
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비선형 거동의 영향을 저감시키는 방법 및 장치
MOS EVERHARDUS CORNELIS, JENSEN ERIK, TEN BERGE PETER, CEKLI HAKKI ERGUN, VAN HAREN RICHARD JOHANNES FRANCISCUS, WARDENIER PETER HANZEN
Year of Publication 26.06.2018
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Year of Publication 26.06.2018
Patent
리소그래피 프로세스의 최적화 방법
MOS EVERHARDUS CORNELIS, WALLERBOS ERIK JOHANNES MARIA, STAALS FRANK, WILDENBERG JO SEBASTIAAN, VAN DER SCHAAR MAURITS, ELICH FRANCISCUS HENDRICUS ARNOLDUS
Year of Publication 29.05.2019
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Year of Publication 29.05.2019
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전산 계측
MOS EVERHARDUS CORNELIS, JUNGBLUT REINER MARIA, VAN RHEE PETRUS GERARDUS, SEGERS BART PETER BERT, SCHMITT WEAVER EMIL PETER, YU HYUN WOO, LIU XING LAN, TEL WIM TJIBBO, KILITZIRAKI MARIA, ZHANG YICHEN
Year of Publication 16.10.2019
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Year of Publication 16.10.2019
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에치 파라미터를 변화시키는 방법
MOS EVERHARDUS CORNELIS, JENSEN ERIK, VAN DIJK LEON PAUL, URBANCZYK ADAM JAN, VAN HAREN RICHARD JOHANNES FRANCISCUS, WERKMAN ROY, WILDENBERG JO SEBASTIAAN, JOSEN MARINUS, RAJASEKHARAN BIJOY, CALADO VICTOR EMANUEL
Year of Publication 24.07.2019
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Year of Publication 24.07.2019
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