PRESSURE-TYPE FLOW RATE CONTROL DEVICE AND VAPORIZATION SUPPLY DEVICE
NISHINO KOJI, NAKATANI TAKANORI, IKEDA NOBUKAZU, MORISAKI KAZUYUKI, HIDAKA ATSUSHI
Year of Publication 05.10.2023
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Year of Publication 05.10.2023
Patent
FLOW-RATE CONTROLLER AND VAPORIZATION SUPPLY APPARATUS
NISHINO KOJI, NAKATANI TAKANORI, IKEDA NOBUKAZU, MORISAKI KAZUYUKI, HIDAKA ATSUSHI
Year of Publication 21.09.2023
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Year of Publication 21.09.2023
Patent
가스 공급 시스템 및 가스 공급 방법
IKEDA NOBUKAZU, NISHINO KOUJI, MORISAKI KAZUYUKI, HIDAKA ATSUSHI, NAKATANI TAKATOSHI
Year of Publication 29.03.2023
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Year of Publication 29.03.2023
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GAS SUPPLY SYSTEM AND GAS SUPPLY METHOD
NISHINO Kouji, HIDAKA Atsushi, MORISAKI Kazuyuki, NAKATANI Takatoshi, IKEDA Nobukazu
Year of Publication 05.05.2022
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Year of Publication 05.05.2022
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DIAPHRAGM VALVE
HIRATA KAORU, IDEGUCHI KEISUKE, NAGASE MASAAKI, IKEDA NOBUKAZU, SUGIMOTO KOSUKE, KITANO MASAFUMI, NISHINO KOUJI, MORISAKI KAZUYUKI, HIDAKA ATSUSHI
Year of Publication 23.02.2024
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Year of Publication 23.02.2024
Patent
유체 제어기용 케이싱 및 그것을 구비한 유체 제어기
HIROTA TOMOKAZU, IKEDA NOBUKAZU, NISHINO KOUJI, MORISAKI KAZUYUKI, HIDAKA ATSUSHI, NAKATANI TAKATOSHI
Year of Publication 03.03.2023
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Year of Publication 03.03.2023
Patent
제어기 및 기화 공급 장치
HIRATA KAORU, NAGASE MASAAKI, IKEDA NOBUKAZU, KITANO MASAFUMI, NISHINO KOUJI, TANAKA KAZUTERU, MORISAKI KAZUYUKI, HIDAKA ATSUSHI, NAKATANI TAKATOSHI
Year of Publication 17.10.2023
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Year of Publication 17.10.2023
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CASING FOR FLUID CONTROLLER AND FLUID CONTROLLER PROVIDED WITH SAME
NISHINO Kouji, HIDAKA Atsushi, MORISAKI Kazuyuki, NAKATANI Takatoshi, IKEDA Nobukazu, HIROTA Tomokazu
Year of Publication 05.05.2022
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Year of Publication 05.05.2022
Patent
CONTROLLER AND VAPORIZATION SUPPLY DEVICE
HIRATA Kaoru, NISHINO Kouji, HIDAKA Atsushi, TANAKA Kazuteru, MORISAKI Kazuyuki, NAKATANI Takatoshi, NAGASE Masaaki, IKEDA Nobukazu, KITANO Masafumi
Year of Publication 06.10.2022
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Year of Publication 06.10.2022
Patent
다이어프램 밸브
HIRATA KAORU, IDEGUCHI KEISUKE, NAGASE MASAAKI, IKEDA NOBUKAZU, SUGIMOTO KOSUKE, KITANO MASAFUMI, NISHINO KOUJI, MORISAKI KAZUYUKI, HIDAKA ATSUSHI
Year of Publication 08.03.2022
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Year of Publication 08.03.2022
Patent
유량 제어 장치
HIRATA KAORU, IKEDA NOBUKAZU, NISHINO KOUJI, MORISAKI KAZUYUKI, HIRAI TOURU
Year of Publication 11.06.2018
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Year of Publication 11.06.2018
Patent
DIAPHRAGM VALVE
HIRATA Kaoru, NISHINO Kouji, HIDAKA Atsushi, MORISAKI Kazuyuki, SUGIMOTO Kosuke, IDEGUCHI Keisuke, NAGASE Masaaki, IKEDA Nobukazu, KITANO Masafumi
Year of Publication 04.03.2021
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Year of Publication 04.03.2021
Patent
Magnetic Control of Arc Plasma and its Modelling
Nomura, Kazufumi, Morisaki, Kazuyuki, Hirata, Yoshinori
Published in Welding in the world (01.07.2009)
Published in Welding in the world (01.07.2009)
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Journal Article
GAS SPLIT-FLOW SUPPLY DEVICE FOR SEMICONDUCTOR PRODUCTION DEVICE
HIRATA KAORU, IKEDA NOBUKAZU, NISHINO KOUJI, MORISAKI KAZUYUKI, DOHI RYOUSUKE
Year of Publication 08.08.2014
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Year of Publication 08.08.2014
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GAS SPLIT-FLOW SUPPLY DEVICE FOR SEMICONDUCTOR PRODUCTION DEVICE
NISHINO, KOUJI, DOHI, RYOUSUKE, IKEDA, NOBUKAZU, HIRATA, KAORU, MORISAKI, KAZUYUKI
Year of Publication 08.08.2013
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Year of Publication 08.08.2013
Patent