Low Vf and highly reliable 16 kV ultrahigh voltage SiC flip-type n-channel implantation and epitaxial IGBT
Yonezawa, Yoshiyuki, Mizushima, Tomonori, Takenaka, Kensuke, Fujisawa, Hiroyuki, Kato, Tomohisa, Harada, Shinsuke, Tanaka, Yasunori, Okamoto, Mitsuo, Sometani, Mitsuru, Okamoto, Dai, Kumagai, Naoki, Matsunaga, Shinichiro, Deguchi, Tadayoshi, Arai, Manabu, Hatakeyama, Tetsuo, Makifuchi, Youichi, Araoka, Tsuyoshi, Oose, Naoyuki, Tsutsumi, Takashi, Yoshikawa, Mitsuru, Tatera, Katsumi, Harashima, Masayuki, Sano, Yukio, Morisaki, Eisuke, Takei, Manabu, Miyajima, Masaaki, Kimura, Hiroshi, Otsuki, Akihiro, Fukuda, Kenji, Okumura, Hajime, Kimoto, Tsunenobu
Published in 2013 IEEE International Electron Devices Meeting (01.12.2013)
Published in 2013 IEEE International Electron Devices Meeting (01.12.2013)
Get full text
Conference Proceeding
FILM-FORMING APPARATUS AND SUBSTRATE HOLDER USED THEREIN
MORISAKI EISUKE, HARASHIMA MASAYUKI, MACHIYAMA WATARU, SANO YUKIO, KOBAYASHI HIROKATSU
Year of Publication 06.08.2015
Get full text
Year of Publication 06.08.2015
Patent
Dynamic characteristics of large current capacity module using 16-kV ultrahigh voltage SiC flip-type n-channel IE-IGBT
Mizushima, Tomonori, Takenaka, Kensuke, Fujisawa, Hiroyuki, Kato, Tomohisa, Harada, Shinsuke, Tanaka, Yasunori, Okamoto, Mitsuo, Sometani, Mitsuru, Okamoto, Dai, Kumagai, Naoki, Matsunaga, Shinichiro, Deguchi, Tadayoshi, Arai, Manabu, Hatakeyama, Tetsuo, Makifuchi, Youichi, Araoka, Tsuyoshi, Oose, Naoyuki, Tsutsumi, Takashi, Yoshikawa, Mitsuru, Tatera, Katsumi, Tanaka, Atsushi, Ogata, Syuji, Nakayama, Koji, Hayashi, Toshihiko, Asano, Katsunori, Harashima, Masayuki, Sano, Yukio, Morisaki, Eisuke, Takei, Manabu, Miyajima, Masaaki, Kimura, Hiroshi, Otsuki, Akihiro, Yonezawa, Yoshiyuki, Fukuda, Kenji, Okumura, Hajime, Kimoto, Tsunenobu
Published in 2014 IEEE 26th International Symposium on Power Semiconductor Devices & IC's (ISPSD) (01.06.2014)
Published in 2014 IEEE 26th International Symposium on Power Semiconductor Devices & IC's (ISPSD) (01.06.2014)
Get full text
Conference Proceeding
SURFACE TREATMENT METHOD AND SURFACE TREATMENT APPARATUS
YAMADA ISAO, MORISAKI EISUKE, TOYODA NORIAKI, NARUSHIMA MASAKI, HARASHIMA MASAYUKI
Year of Publication 02.12.2011
Get full text
Year of Publication 02.12.2011
Patent
FILM FORMING APPARATUS AND METHOD OF FORMING FILM
YOSHIKAWA JUN, KIMOTO TSUNENOBU, MORISAKI EISUKE, KAWAMOTO NORIAKI, AKETA MASATOSHI, SAWADA IKUO, KOBAYASHI HIROKATSU
Year of Publication 13.03.2012
Get full text
Year of Publication 13.03.2012
Patent
FILM FORMING APPARATUS AND METHOD OF FORMING FILM
KOBAYASHI, HIROKATSU, KAWAMOTO, NORIAKI, YOSHIKAWA, JUN, SAWADA, IKUO, AKETA, MASATOSHI, KIMOTO, TSUNENOBU, MORISAKI, EISUKE
Year of Publication 03.07.2008
Get full text
Year of Publication 03.07.2008
Patent
FILM FORMING APPARATUS AND SUBSTRATE PROCESSING METHOD
KOBAYASHI, HIROKATSU, NAKAMURA, TAKASHI, KAWAMOTO, NORIAKI, KAMISAWA, AKIRA, AKETA, MASATOSHI, KIMOTO, TSUNENOBU, MORISAKI, EISUKE
Year of Publication 30.08.2007
Get full text
Year of Publication 30.08.2007
Patent