SHALLOW TRENCH ISOLATION FOR SOI STRUCTURES COMBINING SIDEWALL SPACER AND BOTTOM LINER
WINSTEAD BRIAN A, HALL MARK D, LOIKO KONSTANTIN V, VAN GOMPEL TONI D, TURNER MICHAEL D, MORA RODE R
Year of Publication 09.10.2014
Get full text
Year of Publication 09.10.2014
Patent
Shallow trench isolation for SOI structures combining sidewall spacer and bottom liner
WINSTEAD BRIAN A, HALL MARK D, LOIKO KONSTANTIN V, VAN GOMPEL TONI D, TURNER MICHAEL D, MORA RODE R
Year of Publication 01.07.2014
Get full text
Year of Publication 01.07.2014
Patent
Semiconductor fabrication process including silicide stringer removal processing
HARRISON MICHAEL G, JAWARANI DHARMESH, MOORE JOHN E, ALVIS JOHN R, MATHEW LEO, MORA RODE R
Year of Publication 16.08.2011
Get full text
Year of Publication 16.08.2011
Patent
Semiconductor fabrication process including silicide stringer removal processing
Jawarani, Dharmesh, Alvis, John R, Harrison, Michael G, Mathew, Leo, Moore, John E, Mora, Rode R
Year of Publication 16.08.2011
Get full text
Year of Publication 16.08.2011
Patent
SHALLOW TRENCH ISOLATION FOR SOI STRUCTURES COMBINING SIDEWALL SPACER AND BOTTOM LINER
WINSTEAD BRIAN A, HALL MARK D, LOIKO KONSTANTIN V, VAN GOMPEL TONI D, TURNER MICHAEL D, MORA RODE R
Year of Publication 01.11.2012
Get full text
Year of Publication 01.11.2012
Patent
Shallow trench isolation for SOI structures combining sidewall spacer and bottom liner
Loiko, Konstantin V, Van Gompel, Toni D, Mora, Rode R, Turner, Michael D, Winstead, Brian A, Hall, Mark D
Year of Publication 07.08.2012
Get full text
Year of Publication 07.08.2012
Patent