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"MOOS, PATRICK"
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"MOOS, PATRICK"
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구역 인상 설비에서 실리콘으로부터 단결정 봉을 생산하는 장치 및 방법
by
MOOS PATRICK
Year of Publication
06.11.2023
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슬릿 밸브 터널에서 퍼지 가스의 가스 커튼을 생성하는 방법 및 슬릿 밸브 터널
by
FELDMANN MARCO
,
MOOS PATRICK
Year of Publication
07.03.2023
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에피택시 반응기에서의 반도체 웨이퍼를 취급하는 장치 및 에피택셜 층을 갖는 반도체 웨이퍼를 제조하는 방법
by
MOOS PATRICK
,
HECHT HANNES
Year of Publication
13.03.2019
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증착 챔버 내에 에피택셜층을 갖는 반도체 웨이퍼를 제조하기 위한 방법, 에피택셜층을 갖는 반도체 웨이퍼를 제조하기 위한 장치, 및 에피택셜층을 갖는 반도체 웨이퍼
by
SCHAUER REINHARD
,
MOOS PATRICK
Year of Publication
18.07.2018
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DEVICE AND METHOD FOR PRODUCING A MONOCRYSTALLINE SILICON ROD IN A ZONE-MELTING PULLING SYSTEM
by
Moos
,
Patrick
Year of Publication
19.09.2024
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METHOD AND APPARATUS FOR PRODUCING A GAS CURTAIN OF PURGE GAS IN A SLIT VALVE TUNNEL
by
MOOS
,
Patrick
,
FELDMANN, Marco
Year of Publication
14.09.2023
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METHOD FOR GENERATING A GAS CURTAIN FROM PURGE GAS IN A SLIT VALVE TUNNEL AND SLIT VALVE TUNNEL
by
Moos
,
Patrick
,
Feldmann, Marco
Year of Publication
30.08.2023
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METHOD AND APPARATUS FOR SORTING AND ALIGNING SEMICONDUCTOR DISCS
by
MOOS
,
Patrick
Year of Publication
13.06.2024
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METHOD AND APPARATUS FOR SORTING AND ALIGNING SEMICONDUCTOR WAFERS
by
Moos
,
Patrick
Year of Publication
12.06.2024
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Device for handling a semiconductor wafer in an epitaxy reactor and method for producing a semiconductor wafer having an epitaxial layer
by
Hecht, Hannes
,
Moos
,
Patrick
Year of Publication
12.04.2022
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Device and method for producing silicon single crystal rod in zone melting lifting system
by
MOOS PATRICK
Year of Publication
31.10.2023
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Device and method for producing a monocrystalline rod from silicon in a zone pulling installation
by
MOOS
,
PATRICK
Year of Publication
01.01.2023
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METHOD FOR PRODUCING A SEMICONDUCTOR WAFER HAVING AN EPITAXIAL LAYER IN A DEPOSITION CHAMBER, APPARATUS FOR PRODUCING A SEMICONDUCTOR WAFER HAVING AN EPITAXIAL LAYER, AND SEMICONDUCTOR WAFER HAVING AN EPITAXIAL LAYER
by
MOOS
,
Patrick
,
SCHAUER, Reinhard
Year of Publication
20.01.2021
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DEVICE AND METHOD FOR PRODUCING A MONOCRYSTALLINE SILICON ROD IN A ZONE-MELTING PULLING SYSTEM
by
MOOS
,
Patrick
Year of Publication
22.09.2022
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DEVICE AND METHOD FOR MANUFACTURING A SILICON MONOCRYSTALLINE ROD IN A ZONE FLOATING INSTALLATION
by
Moos
,
Patrick
Year of Publication
21.09.2022
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APPARATUS VON HANDLING A SEMICONDUCTOR WAFER IN AN EPITAXY REACTOR AND METHOD FOR MANUFACTURING A SEMICONDUCTOR WAFER WITH AN EPITACTIC LAYER
by
MOOS
,
Patrick
,
HECHT, Hannes
Year of Publication
02.09.2020
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Method for producing a semiconductor wafer with epitaxial layer in a deposition chamber, apparatus for producing a semiconductor wafer with epitaxial layer, and semiconductor wafer with epitaxial layer
by
Schauer, Reinhard
,
Moos
,
Patrick
Year of Publication
24.03.2020
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DEVICE FOR HANDLING A SEMICONDUCTOR WAFER IN AN EPITAXY REACTOR AND METHOD FOR PRODUCING A SEMICONDUCTOR WAFER HAVING AN EPITAXIAL LAYER
by
MOOS
,
Patrick
,
HECHT, Hannes
Year of Publication
10.10.2019
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Susceptor with interchangeable supporting elements and uses of the same
by
VORDERWESTNER, MARTIN
,
MOOS
,
PATRICK
Year of Publication
01.05.2024
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SUSCEPTOR HAVING EXCHANGEABLE SUPPORT ELEMENTS
by
MOOS
,
Patrick
,
VORDERWESTNER, Martin
Year of Publication
14.03.2024
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