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Year of Publication 21.01.2022
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Year of Publication 11.03.2022
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Year of Publication 17.11.2023
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Year of Publication 17.11.2023
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Year of Publication 27.09.2022
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Year of Publication 27.09.2022
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Year of Publication 05.11.2020
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Year of Publication 05.11.2020
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RADIATION SOURCE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
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Year of Publication 25.05.2011
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Year of Publication 25.05.2011
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METHOD FOR REMOVING A CONTAMINATION LAYER FROM AN OPTICAL SURFACE, METHOD FOR GENERATING A CLEANING GAS, AND CORRESPONDING CLEANING AND CLEANING GAS GENERATION ARRANGEMENTS
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Year of Publication 06.08.2014
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OPTICAL ELEMENT, LITHOGRAPHIC APPARATUS INCLUDING SUCH AN OPTICAL ELEMENT, DEVICE MANUFACTURING METHOD, AND DEVICE MANUFACTURED THEREBY
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Year of Publication 29.11.2010
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Year of Publication 29.11.2010
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Year of Publication 18.11.2010
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Year of Publication 18.11.2010
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METHOD FOR REMOVING A CONTAMINATION LAYER FROM AN OPTICAL SURFACE, METHOD FOR GENERATING A CLEANING GAS, AND CORRESPONDING CLEANING AND CLEANING GAS GENERATION ARRANGEMENTS
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Year of Publication 07.09.2010
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Year of Publication 07.09.2010
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LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, CLEANING SYSTEM AND METHOD FOR CLEANING A PATTERNING DEVICE
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Year of Publication 17.01.2011
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Year of Publication 17.01.2011
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A TARGET MATERIAL, A SOURCE, AN EUV LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD USING THE SAME
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Year of Publication 21.12.2010
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Year of Publication 21.12.2010
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