Method for producing circuit structures on a semiconductor substrate and semiconductor configuration with functional circuit structures and dummy circuit structures
Kling, Sabine, Savignac, Dominique, Moll, Hans-Peter, Haffner, Henning, Hietschold, Elke, Anke, Ines
Year of Publication 01.07.2003
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Year of Publication 01.07.2003
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Method for producing circuit structures on a semiconductor substrate and semiconductor configuration with functional circuit structures and dummy circuit structures
HIETSCHOLD ELKE, HAFFNER HENNING, SAVIGNAC DOMINIQUE, MOLL HANS-PETER, KLING SABINE, ANKE INES
Year of Publication 01.07.2003
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Year of Publication 01.07.2003
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Method for fabricating a self-aligning mask
EFFERENN DIRK, RADECKER JORG, WICH-GLASEN ANDREAS, VON SCHWERIN ULRIKE GRUNING, MOLL HANS-PETER
Year of Publication 27.02.2003
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Year of Publication 27.02.2003
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Method for fabricating a self-aligning mask
Efferenn, Dirk, Von Schwerin, Ulrike, Moll, Hans-Peter, Radecker, Jorg, Wich-Glasen, Andreas
Year of Publication 27.02.2003
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Year of Publication 27.02.2003
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Method for producing circuit structures on a semiconductor substrate and semiconductor configuration with functional circuit structures and dummy circuit structures
HIETSCHOLD ELKE, HAFFNER HENNING, SAVIGNAC DOMINIQUE, MOLL HANS-PETER, KLING SABINE, ANKE INES
Year of Publication 23.05.2002
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Year of Publication 23.05.2002
Patent
Method for producing circuit structures on a semiconductor substrate and semiconductor configuration with functional circuit structures and dummy circuit structures
Savignac, Dominique, Kling, Sabine, Moll, Hans-Peter, Haffner, Henning, Hietschold, Elke, Anke, Ines
Year of Publication 23.05.2002
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Year of Publication 23.05.2002
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Producing circuit structures on semiconducting substrate involves combining first dummy structure with second to exceed minimum size if envisaged structure smaller than minimum
HIETSCHOLD, ELKE, MOLL, HANS-PETER, KLING, SABINE, HAFFNER, HENNING, SAVIGNAC, DOMINIQUE
Year of Publication 08.05.2002
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Year of Publication 08.05.2002
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Method for fabricating a self-aligning mask
HANS-PETER MOLL, ULRIKE GRUENING VON SCHWERIN, JOERG RADECKER, DIRK EFFERENN, ANDREAS WICH-GLASEN
Year of Publication 21.07.2008
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Year of Publication 21.07.2008
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Verfahren zum Ausbilden eines Halbleiterbauelements
LUDWIG, FRANK, MOLL, HANS-PETER, WEIS, ROLF, WILSON, KIMBERLY, STOPFORD, PHILIP
Year of Publication 20.03.2008
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Year of Publication 20.03.2008
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Herstellungsverfahren für einen Graben-Transistor und entsprechender Graben-Transistor
POPP, MARTIN, STRASSER, MARC, MOLL, HANS-PETER, WEIS, ROLF, LUYKEN, HANNES, SCHLOESSER, TILL
Year of Publication 12.04.2007
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Year of Publication 12.04.2007
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Fabrication method for a trench transistor and corresponding trench transistor
POPP, MARTIN, STRASSER, MARC, MOLL, HANS-PETER, LUYKEN, RICHARD, ROLF WEISS, SCHLOESSER, TILL
Year of Publication 01.04.2007
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Year of Publication 01.04.2007
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