Thermal Atomic Layer Etching of Copper by Sequential Steps Involving Oxidation and Exposure to Hexafluoroacetylacetone
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Published in ECS journal of solid state science and technology (2018)
Published in ECS journal of solid state science and technology (2018)
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A framework for modeling the nanomechanical and nanotribological properties of high temperature HfBxCy coatings
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Published in Wear (15.03.2019)
Published in Wear (15.03.2019)
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ETCH-STOP LAYER DEPOSITION FOR ENHANCED PATTERNING
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Year of Publication 10.03.2023
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MOHIMI ELHAM, SHANKAR NAGRAJ, ZHANG PENGYI, JARIWALA BHAVIN, HENRI JON, MAHOROWALA ARPAN PRAVIN, REDDY KAPU SIRISH
Year of Publication 21.12.2020
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Year of Publication 21.12.2020
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선택적인 증착 프로세스에서 선택도를 개선하기 위한 전처리 방법
LEMAIRE PAUL C, HAUSMANN DENNIS, MOHIMI ELHAM, SMITH DAVID CHARLES, ZHANG PENGYI, SHANKAR NAGRAJ, SHARMA KASHISH, FOX ALEXANDER R, REDDY KAPU SIRISH
Year of Publication 18.03.2021
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Year of Publication 18.03.2021
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에어 갭 (AIR-GAPPED) 플레넘들 및 오버헤드 격리 가스 분배기를 갖는 샤워헤드
DRAPER EMILE C, RAMNANI PANKAJ G, MOHIMI ELHAM, BI FENG, SHANKAR NAGRAJ, RAINVILLE MELIHA GOZDE, ZHANG PENGYI, WOMACK JEFFREY D, REDDY KAPU SIRISH
Year of Publication 30.12.2020
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Year of Publication 30.12.2020
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Chemical Vapor Deposition of Copper: Use of a Molecular Inhibitor to Afford Uniform Nanoislands or Smooth Films
Babar, Shaista, Davis, Luke M., Zhang, Pengyi, Mohimi, Elham, Girolami, Gregory S., Abelson, John R.
Published in ECS journal of solid state science and technology (01.01.2014)
Published in ECS journal of solid state science and technology (01.01.2014)
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Journal Article
Selective deposition of etch-stop layer for enhanced patterning
Zhang, Pengyi, Henri, Jon, Mohimi, Elham, Jariwala, Bhavin, Mahorowala, Arpan Pravin, Reddy, Kapu Sirish, Shankar, Nagraj
Year of Publication 09.01.2024
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Year of Publication 09.01.2024
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Area selective CVD of metallic films using precursor gases and inhibitors
Zhang, Zhejun, Mohimi, Elham, Liu, Sumeng, Abelson, John R, Girolami, Gregory S
Year of Publication 21.02.2023
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Year of Publication 21.02.2023
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SELECTIVE DEPOSITION OF ETCH-STOP LAYER FOR ENHANCED PATTERNING
Zhang, Pengyi, Henri, Jon, Mohimi, Elham, Jariwala, Bhavin, Mahorowala, Arpan Pravin, Reddy, Kapu Sirish, Shankar, Nagraj
Year of Publication 18.11.2021
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Year of Publication 18.11.2021
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Selective deposition of etch-stop layer for enhanced patterning
Zhang, Pengyi, Henri, Jon, Mohimi, Elham, Jariwala, Bhavin, Mahorowala, Arpan Pravin, Reddy, Kapu Sirish, Shankar, Nagraj
Year of Publication 17.08.2021
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Year of Publication 17.08.2021
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SELECTIVE DEPOSITION OF ETCH-STOP LAYER FOR ENHANCED PATTERNING
Zhang, Pengyi, Henri, Jon, Mohimi, Elham, Jariwala, Bhavin, Mahorowala, Arpan Pravin, Reddy, Kapu Sirish, Shankar, Nagraj
Year of Publication 28.05.2020
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Year of Publication 28.05.2020
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Selective deposition of etch-stop layer for enhanced patterning
Zhang, Pengyi, Henri, Jon, Mohimi, Elham, Jariwala, Bhavin, Mahorowala, Arpan Pravin, Reddy, Kapu Sirish, Shankar, Nagraj
Year of Publication 18.02.2020
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Year of Publication 18.02.2020
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