CMOS integrated tactile sensor array by porous Si bulk micromachining
Adam, Maria, Mohacsy, Tibor, Jonas, Peter, Ducso, Csaba, Vazsonyi, Eva, Barsony, Istvan
Published in Sensors and actuators. A. Physical. (10.03.2008)
Published in Sensors and actuators. A. Physical. (10.03.2008)
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ANOMALOUS BIAS DEPENDENCE OF THE NOISE IN POROUS SI LED
Szentpali, Bela, Mohacsy, Tibor, Barsony, Istvan
Published in Fluctuation and noise letters (01.06.2004)
Published in Fluctuation and noise letters (01.06.2004)
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MONOLITHICALLY INTEGRATED MONOCRYSTALLINE MICROMECHANICAL ELEMENTS
DUECSOE, CSABA, EROES, MAGDOLNA, ADAM, ANTALNE, MOHACSY, TIBOR, VAZSONYI, EVA, BARSONY, ISTVAN, PAYER, KAROLYNE
Year of Publication 25.11.2009
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Year of Publication 25.11.2009
Patent
MONOLITHICALLY INTEGRATED MONOCRYSTALLINE MICROMECHANICAL ELEMENTS
DUECSOE, CSABA, EROES, MAGDOLNA, ADAM, ANTALNE, MOHACSY, TIBOR, VAZSONYI, EVA, BARSONY, ISTVAN, PAYER, KAROLYNE
Year of Publication 25.02.2009
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Year of Publication 25.02.2009
Patent
METHOD FOR PRODUCING MICROMECHANICAL ELEMENTS CAN BE INTEGRATED INTO CMOS TECHNOLOGY, CARRYING MONOLITH SI AND MONOLITH SIO PRODUCED BY POROUS SI MICROMANUFACTURING PROCESS
VAZSONYI EVA, ADAM ANTALNE, DUECSOE CSABA, PAYER KAROLYNE, MOHACSY TIBOR, BARSONY ISTVAN, EROES MAGDOLNA
Year of Publication 28.05.2008
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Year of Publication 28.05.2008
Patent
CMOS INTEGRATED PROCESS FOR FABRICATING MONOCRYSTALLINE SILICON MICROMECHANICAL ELEMENTS BY POROUS SILICON MICROMACHINING AND SENSOR CHIP COMPRISING SUCH ELEMENT
DUECSOE, CSABA, EROES, MAGDOLNA, ADAM, ANTALNE, MOHACSY, TIBOR, VAZSONYI, EVA, BARSONY, ISTVAN, PAYER, KAROLYNE
Year of Publication 10.04.2008
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Year of Publication 10.04.2008
Patent
CMOS INTEGRATED PROCESS FOR FABRICATING MONOCRYSTALLINE SILICON
DUECSOE, CSABA, EROES, MAGDOLNA, ADAM, ANTALNE, MOHACSY, TIBOR, VAZSONYI, EVA, BARSONY, ISTVAN, PAYER, KAROLYNE
Year of Publication 14.02.2008
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Year of Publication 14.02.2008
Patent
CMOS INTEGRATED PROCESS FOR FABRICATING MONOCRYSTALLINE SILICON
DUECSOE, CSABA, EROES, MAGDOLNA, ADAM, ANTALNE, MOHACSY, TIBOR, VAZSONYI, EVA, BARSONY, ISTVAN, PAYER, KAROLYNE
Year of Publication 21.12.2007
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Year of Publication 21.12.2007
Patent