A LITHOGRAPHIC APPARATUS, A METHOD OF CONTROLLING THE APPARATUS AND A DEVICE MANUFACTURING METHOD
LIEBREGTS PAULUS MARTINUS MARIA, STEFFENS KOEN, LI HUA, GUNTER PIETER LEIN JOSEPH, BELL FRANCISCUS WILHELMUS, MULKENS JOHANNES CATHARINUS HUBERTUS, LEENDERS MARTINUS HENDRIKUS ANTONIUS, MOERMAN RICHARD, SHULEPOV SERGEI, BRANDS GERT JAN GERARDUS JOHANNES THOMAS, MEIJERS RALPH JOSEPH, STAVENGA MARCO KOERT, EUMMELEN ERIK HENRICUS EGIDIUS CATHARINA, BESSEMS DAVID, MA ZHENHUA, SMITS MARCUS AGNES JOHANNES, RIEPEN MICHEL, CROMWIJK JAN WILLEM, EVANGELISTA FABRIZIO, KEMPER NICOLAAS RUDOLF, JOSEN MARINUS, WITBERG ERIK
Year of Publication 14.12.2011
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Year of Publication 14.12.2011
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A LITHOGRAPHIC APPARATUS, A METHOD OF CONTROLLING THE APPARATUS AND A DEVICE MANUFACTURING METHOD
LIEBREGTS PAULUS MARTINUS MARIA, STEFFENS KOEN, LI HUA, GUNTER PIETER LEIN JOSEPH, BELL FRANCISCUS WILHELMUS, MULKENS JOHANNES CATHARINUS HUBERTUS, LEENDERS MARTINUS HENDRIKUS ANTONIUS, MOERMAN RICHARD, SHULEPOV SERGEI, BRANDS GERT JAN GERARDUS JOHANNES THOMAS, MEIJERS RALPH JOSEPH, STAVENGA MARCO KOERT, EUMMELEN ERIK HENRICUS EGIDIUS CATHARINA, BESSEMS DAVID, MA ZHENHUA, SMITS MARCUS AGNES JOHANNES, RIEPEN MICHEL, CROMWIJK JAN WILLEM, EVANGELISTA FABRIZIO, KEMPER NICOLAAS RUDOLF, JOSEN MARINUS, WITBERG ERIK
Year of Publication 27.08.2010
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Year of Publication 27.08.2010
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Lithographic apparatus and device manufacturing method involving a heater
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Year of Publication 05.07.2022
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Year of Publication 05.07.2022
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Lithographic apparatus
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Year of Publication 12.05.2020
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Year of Publication 12.05.2020
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LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A HEATER
TEN KATE, Nicolaas, VAN DER NET, Antonius Johannus, JANSSEN, Franciscus Johannes Joseph, DE JONG, Frederik Eduard, SMEETS, Martin Frans Pierre, RIEPEN, Michel, TINNEMANS, Patricius Aloysius Jacobus, VERHAGEN, Martinus Cornelis Maria, OTTENS, Joost Jeroen, MOERMAN, Richard, BOOM, Herman, REUHMAN-HUISKEN, Maria Elisabeth, VERSPAY, Jacobus Johannus Leonardus Hendricus, STAVENGA, Marco Koert, LOOPSTRA, Erik Roelof, GOORMAN, Koen, QUAEDACKERS, Johannes Anna, DE MOL, Christianus Gerardus Maria, MENCHTCHIKOV, Boris, NIHTIANOV, Stoyan, SCHOONDERMARK, Bart Leonard Peter, JACOBS, Johannes Henricus Wilhelmus, VAN MEER, Aschwin Lodewijk Hendricus Johannes, MUITJENS, Marcel Johannus Elisabeth Hubertus, MERTENS, Jeroen Johannes Sophia Maria, CADEE, Theodorus Petrus Maria
Year of Publication 04.03.2021
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Year of Publication 04.03.2021
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Lithographic apparatus and device manufacturing method involving a heater
Boom, Herman, Ten Kate, Nicolaas, De Mol, Christianus Gerardus Maria, Quaedackers, Johannes Anna, De Jong, Frederik Eduard, Nihtianov, Stoyan, Riepen, Michel, Mertens, Jeroen Johannes Sophia Maria, Loopstra, Erik Roelof, Moerman, Richard, Menchtchikov, Boris, Van Meer, Aschwin Lodewijk Hendricus Johannes, Goorman, Koen, Cadee, Theodorus Petrus Maria, Stavenga, Marco Koert, Tinnemans, Patricius Aloysius Jacobus, Verspay, Jacobus Johannus Leonardus Hendricus, Jacobs, Johannes Henricus Wilhelmus, Reuhman-Huisken, Maria Elisabeth, Verhagen, Martinus Cornelis Maria, Smeets, Martin Frans Pierre, Schoondermark, Bart Leonard Peter, Van Der Net, Antonius Johannus, Janssen, Franciscus Johannes Joseph, Ottens, Joost Jeroen, Muitjens, Marcel Johannus Elisabeth Hubertus
Year of Publication 17.11.2020
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Year of Publication 17.11.2020
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LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A HEATER
TEN KATE, Nicolaas, VAN DER NET, Antonius Johannus, JANSSEN, Franciscus Johannes Joseph, DE JONG, Frederik Eduard, SMEETS, Martin Frans Pierre, RIEPEN, Michel, TINNEMANS, Patricius Aloysius Jacobus, VERHAGEN, Martinus Cornelis Maria, OTTENS, Joost Jeroen, MOERMAN, Richard, BOOM, Herman, REUHMAN-HUISKEN, Maria Elisabeth, VERSPAY, Jacobus Johannus Leonardus Hendricus, STAVENGA, Marco Koert, LOOPSTRA, Erik Roelof, GOORMAN, Koen, QUAEDACKERS, Johannes Anna, DE MOL, Christianus Gerardus Maria, MENCHTCHIKOV, Boris, NIHTIANOV, Stoyan, SCHOONDERMARK, Bart Leonard Peter, JACOBS, Johannes Henricus Wilhelmus, VAN MEER, Aschwin Lodewijk Hendricus Johannes, MUITJENS, Marcel Johannus Elisabeth Hubertus, MERTENS, Jeroen Johannes Sophia Maria, CADEE, Theodorus Petrus Maria
Year of Publication 01.08.2019
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Year of Publication 01.08.2019
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Lithographic apparatus and device manufacturing method involving a heater
Boom, Herman, Ten Kate, Nicolaas, De Mol, Christianus Gerardus Maria, Quaedackers, Johannes Anna, De Jong, Frederik Eduard, Nihtianov, Stoyan, Riepen, Michel, Mertens, Jeroen Johannes Sophia Maria, Loopstra, Erik Roelof, Moerman, Richard, Menchtchikov, Boris, Van Meer, Aschwin Lodewijk Hendricus Johannes, Goorman, Koen, Cadee, Theodorus Petrus Maria, Stavenga, Marco Koert, Tinnemans, Patricius Aloysius Jacobus, Verspay, Jacobus Johannus Leonardus Hendricus, Jacobs, Johannes Henricus Wilhelmus, Reuhman-Huisken, Maria Elisabeth, Verhagen, Martinus Cornelis Maria, Smeets, Martin Frans Pierre, Schoondermark, Bart Leonard Peter, Van Der Net, Antonius Johannus, Janssen, Franciscus Johannes Joseph, Ottens, Joost Jeroen, Muitjens, Marcel Johannus Elisabeth Hubertus
Year of Publication 09.04.2019
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Year of Publication 09.04.2019
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Lithographic apparatus and device manufacturing method
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Year of Publication 11.12.2012
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Year of Publication 11.12.2012
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Year of Publication 11.12.2012
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Year of Publication 11.12.2012
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LITHOGRAPHIC APPARATUS
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Year of Publication 26.01.2017
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Year of Publication 26.01.2017
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Magnetic flux pinning in epitaxial YBa2Cu3O7-δ thin films
ROSHKO, A, GOODRICH, L. F, RUDMAN, D. A, MOERMAN, R, VALE, L. R
Published in Journal of electronic materials (01.12.1995)
Published in Journal of electronic materials (01.12.1995)
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Conference Proceeding
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Year of Publication 06.03.2012
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Year of Publication 06.03.2012
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Year of Publication 06.03.2012
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Year of Publication 06.03.2012
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Lithographic apparatus
Leenders Martinus Hendrikus Antonius, Eummelen Erik Henricus Egidius Catharina, Liebregts Paulus Martinus Maria, Beckers Marcel, Van Den Dungen Clemens Johannes Gerardus, Van Vliet Evert, Moerman Richard, Verhees Remko Jan Peter, Koppelaars Nicolaas Franciscus, Mulkens Johannes Catharinus Hubertus, Mulder Pieter, Philips Danny Maria Hubertus, Grouwstra Cédric Désiré
Year of Publication 11.10.2016
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Year of Publication 11.10.2016
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LITHOGRAPHIC APPARATUS, AND DEVICE MANUFACTURING METHOD
VAN DOMMELEN YOURI JOHANNES LAURENTIUS MARIA, GROUWSTRA CEDRIC DESIRE, STREEFKERK BOB, MOERMAN RICHARD
Year of Publication 27.01.2011
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Year of Publication 27.01.2011
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Lithographic apparatus and device manufacturing method
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Year of Publication 19.01.2011
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Year of Publication 19.01.2011
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Lithographic apparatus and device manufacturing method
LOOPSTRA ERIK ROELOF, BECKERS MARCEL, DONDERS SJOERD NICOLAAS LAMBERTUS, KEMPER NICOLAAS RUDOLF, BOOM HERMAN, LEENDERS MARTINUS HENDRIKUS ANTONIUS, STREEFKERK BOB, MOERMAN RICHARD, LUIJTEN CARLO CORNELIS MARIA
Year of Publication 23.04.2013
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Year of Publication 23.04.2013
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LITHOGRAPHIC APPARATUS
LIEBREGTS PAULUS MARTINUS MARIA, BECKERS MARCEL, GROUWSTRA CÉDRIC DÉSIRÉ, VERHEES REMKO JAN PETER, VAN VLIET EVERT, MULKENS JOHANNES CATHARINUS HUBERTUS, LEENDERS MARTINUS HENDRIKUS ANTONIUS, MOERMAN RICHARD, EUMMELEN ERIK HENRICUS EGIDIUS CATHARINA, MULDER PIETER, VAN DEN DUNGEN CLEMENS JOHANNES GERARDUS, PHILIPS DANNY MARIA HUBERTUS, KOPPELAARS NICOLAAS FRANCISCUS
Year of Publication 20.08.2015
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Year of Publication 20.08.2015
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Lithographic apparatus
LIEBREGTS PAULUS MARTINUS MARIA, BECKERS MARCEL, GROUWSTRA CÉDRIC DÉSIRÉ, VERHEES REMKO JAN PETER, VAN VLIET EVERT, MULKENS JOHANNES CATHARINUS HUBERTUS, LEENDERS MARTINUS HENDRIKUS ANTONIUS, MOERMAN RICHARD, EUMMELEN ERIK HENRICUS EGIDIUS CATHARINA, MULDER PIETER, VAN DEN DUNGEN CLEMENS JOHANNES GERARDUS, PHILIPS DANNY MARIA HUBERTUS, KOPPELAARS NICOLAAS FRANCISCUS
Year of Publication 19.05.2015
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Year of Publication 19.05.2015
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