SCALPEL mask defect imaging analysis
Stanton, Stuart T., Alexander Liddle, J., Novembre, Anthony E., Mkrtchyan, Masis M.
Published in Microelectronic engineering (1999)
Published in Microelectronic engineering (1999)
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Conference Proceeding
The SCattering with Angular Limitation in Projection Electron-beam Lithography (SCALPEL) system
LIDDLE, J. A, BERGER, S. D, CUSTY, J, FARROW, R. C, FELKER, J. A, FETTER, L. A, FREEMAN, B, HARRIOTT, L. R, HOPKINS, L.L, HUGGINS, H. A, KNUREK, C. S, KRAUS, J. S, BIDDICK, C. J, MIXON, D. A, MKRTCHYAN, M. M, NOVEMBRE, A. E, PEABODY, M. L, SIMPSON, W. M, TARASCON, R. G, WADE, H. H, WASKIEWICZ, W. K, WATSON, G. P, WILLIAMS, J. K, BLAKEY, M. I, WINDT, D. L, BOLAN, BOWLER, S. W, BRADY, K, CAMARDA, R. M, CONNELLY, W. F, CHORKEN, A
Published in Japanese Journal of Applied Physics (01.12.1995)
Published in Japanese Journal of Applied Physics (01.12.1995)
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Conference Proceeding
Journal Article
Multi-source, complex beamline modeling development in MICHELLE-eBEAM
Ovtchinnikov, Serguei G., Mkrtchyan, Masis M., Shtokhammer, R., Petillo, John J., Cooke, Simon J., Vlasov, Alexander N., Levush, Baruch
Published in 2013 Abstracts IEEE International Conference on Plasma Science (ICOPS) (01.06.2013)
Published in 2013 Abstracts IEEE International Conference on Plasma Science (ICOPS) (01.06.2013)
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Conference Proceeding
High accuracy electron beam model development in michelle: Ebeam
Ovtchinnikov, Serguei, Shtokhamer, Roman, Mkrtchyan, Masis, Kostas, Christopher, Petillo, John, Cooke, Simon, Vlasov, Alexander, Levush, Baruch
Published in 2010 Abstracts IEEE International Conference on Plasma Science (01.06.2010)
Published in 2010 Abstracts IEEE International Conference on Plasma Science (01.06.2010)
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Conference Proceeding
A METHOD OF FORMING AN ALIGNMENT FEATURE IN OR ON A MULTI-LAYERED SEMICONDUCTOR STRUCTURE
FARROW REGINALD C, BOULIN DAVID M, KIZILYALLI ISIK C, LAYADI NACE, MKRTCHYAN MASIS
Year of Publication 15.09.2001
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Year of Publication 15.09.2001
Patent
A METHOD OF FORMING AN ALIGNMENT FEATURE IN OR ON A MULTI-LAYERED SEMICONDUCTOR STRUCTURE
FARROW REGINALD C, BOULIN DAVID M, KIZILYALLI ISIK C, LAYADI NACE, MKRTCHYAN MASIS
Year of Publication 07.07.2001
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Year of Publication 07.07.2001
Patent
Multi-source, complex beamline model development in MICHELLE eBEAM
Ovtchinnikov, Serguei, Cooke, Simon, Mkrtchyan, Masis, Shtokhamer, Roman, Vlasov, Alexander, Petillo, John, Levush, Baruch
Published in 2013 IEEE 14th International Vacuum Electronics Conference (IVEC) (01.05.2013)
Published in 2013 IEEE 14th International Vacuum Electronics Conference (IVEC) (01.05.2013)
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Conference Proceeding
Mask-membrane impact on image blur in SCALPEL
Mkrtchyan, Masis, Gallatin, Gregg, Liddle, Alexander, Zhu, Xeiqing, Munro, Eric, Waskiewicz, Warren, Muller, David
Published in Microelectronic engineering (01.09.2001)
Published in Microelectronic engineering (01.09.2001)
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Journal Article
Conference Proceeding
P2-29: High accuracy electron beam model development: MICHELLE eBEAM
Ovtchinnikov, Serguei, Shtokhamer, Roman, Mkrtchyan, Masis, Kostas, Christopher, Petillo, John, Cooke, Simon, Vlasov, Alexander, Levush, Baruch
Published in 2010 IEEE International Vacuum Electronics Conference (IVEC) (01.05.2010)
Published in 2010 IEEE International Vacuum Electronics Conference (IVEC) (01.05.2010)
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Conference Proceeding
Counter streaming beams model in MICHELLE eBEAM
Ovtchinnikov, S., Cooke, S., Mkrtchyan, M., Shtokhamer, R., Vlasov, A., Petillo, J., Levush, B.
Published in IVEC 2012 (01.04.2012)
Published in IVEC 2012 (01.04.2012)
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Conference Proceeding
Multi-layered semiconductor structure
Boulin, David, Farrow, Reginald, Kizilyalli, Isik, Layadi, Nace, Mkrtchyan, Masis
Year of Publication 20.05.2004
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Year of Publication 20.05.2004
Patent