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INHIBITOR OF NITRIDE FILM FORMATION ON OXIDE SURFACE, METHOD OF INHIBITING NITRIDE FILM FORMATION ON OXIDE SURFACE, AND METHOD OF SELECTIVELY FORMING NITRIDE FILM ON NITRIDE SURFACE WITH MIXTURE OF NITRIDE SURFACE AND OXIDE SURFACE
by
SHIMIZU HIDEJI
,
TAKA HIROSHI
,
MURATA ITSUHITO
,
MIZUNO MICHINORI
Year of Publication
01.03.2024
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HALOGEN AMINODISILANE COMPOUND, SILICON-CONTAINING THIN FILM FORMING COMPOSITION, AND SILICON-CONTAINING THIN FILM
by
MURATA ITSUHITO
,
MIZUNO MICHINORI
,
SUZUKI KATSUMASA
Year of Publication
16.05.2022
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SILICON-CONTAINING THIN FILM FORMING COMPOSITION AND SILICON-CONTAINING THIN FILM FORMING METHOD
by
MURATA ITSUHITO
,
MIZUNO MICHINORI
,
SUZUKI KATSUMASA
Year of Publication
16.05.2022
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HALOGENATED AMINO SILANE COMPOUND, THIN FILM-FORMING COMPOSITION AND SILICON-CONTAINING THIN FILM
by
MURATA ITSUHITO
,
MIZUNO MICHINORI
,
SUZUKI KATSUMASA
Year of Publication
19.11.2020
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SILICON-CONTAINING COMPOUND FOR FORMING SILICON-CONTAINING THIN FILM AND FORMING METHOD OF SILICON-CONTAINING THIN FILM
by
MURATA ITSUHITO
,
MIZUNO MICHINORI
,
SUZUKI KATSUMASA
Year of Publication
19.11.2020
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GASEOUS MIXTURE SUPPLY DEVICE, DEVICE FOR MANUFACTURING METAL NITRIDE FILM, AND METHOD FOR MANUFACTURING METAL NITRIDE FILM
by
ADACHI KEISUKE
,
MURATA ITSUHITO
,
MIZUNO MICHINORI
,
SUZUKI KATSUMASA
Year of Publication
13.12.2021
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chemistry
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basic electric elements
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chemical surface treatment
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chemistry
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coating material with metallic material
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coating metallic material
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diffusion treatment of metallic material
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esp@cenet
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