Minimal multi-target plasma sputtering tool
Takahashi, Kazunori, Saito, Taichi, Ando, Akira, Yabuta, Yuki, Mizuguchi, Hisashi, Yamamoto, Naoko, Kamei, Ryuichiro, Hara, Shiro
Published in Vacuum (01.01.2020)
Published in Vacuum (01.01.2020)
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Journal Article
Development of a Minimal multi-target helicon sputtering tool
Takahashi, Kazunori, Saito, Taichi, Kawasaki, Hiroyuki, Chiba, Hayato, Yamamoto, Naoyo, Mizuguchi, Hisashi, Inoue, Michihiro, Hara, Shiro
Published in 2018 International Symposium on Semiconductor Manufacturing (ISSM) (01.12.2018)
Published in 2018 International Symposium on Semiconductor Manufacturing (ISSM) (01.12.2018)
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Conference Proceeding
SMALL-SIZED DEVICE MAINTENANCE MECHANISM
OGISO HISATO, KAMEI RYUICHIRO, SUN YU, NAKANO ZEN, YABUTA YUKI, MIZUGUCHI HISASHI, HARA SHIRO, KATO AKIHIKO, WU ZHENG-QING
Year of Publication 20.06.2016
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Year of Publication 20.06.2016
Patent