Observation of plasma inflows in laser-produced Sn plasma and their contribution to extreme-ultraviolet light output enhancement
Tomita, Kentaro, Pan, Yiming, Sunahara, Atsushi, Kouge, Kouichiro, Mizoguchi, Hakaru, Nishihara, Katsunobu
Published in Scientific reports (01.02.2023)
Published in Scientific reports (01.02.2023)
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Journal Article
Time-resolved two-dimensional profiles of electron density and temperature of laser-produced tin plasmas for extreme-ultraviolet lithography light sources
Tomita, Kentaro, Sato, Yuta, Tsukiyama, Syouichi, Eguchi, Toshiaki, Uchino, Kiichiro, Kouge, Kouichiro, Tomuro, Hiroaki, Yanagida, Tatsuya, Wada, Yasunori, Kunishima, Masahito, Soumagne, Georg, Kodama, Takeshi, Mizoguchi, Hakaru, Sunahara, Atsushi, Nishihara, Katsunobu
Published in Scientific reports (02.10.2017)
Published in Scientific reports (02.10.2017)
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Journal Article
Update of Development Progress of the High Power LPP-EUV Light Source Using a Magnetic Field
Kouge, Kouichiro, Nagai, Shinji, Hori, Tsukasa, Ueno, Yoshifumi, Yanagida, Tatsuya, Miyao, Kenichi, Hayashi, Hideyuki, Watanabe, Yukio, Abe, Tamotsu, Nakarai, Hiroaki, Saito, Takashi, Mizoguchi, Hakaru
Published in Journal of Photopolymer Science and Technology (01.07.2020)
Published in Journal of Photopolymer Science and Technology (01.07.2020)
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Journal Article
Spatial profiles of electron density, electron temperature, average ionic charge, and EUV emission of laser-produced Sn plasmas for EUV lithography
Sato, Yuta, Tomita, Kentaro, Tsukiyama, Syoichi, Eguchi, Toshiaki, Uchino, Kiichiro, Kouge, Kouichiro, Tomuro, Hiroaki, Yanagida, Tatsuya, Wada, Yasunori, Kunishima, Masahito, Kodama, Takeshi, Mizoguchi, Hakaru
Published in Japanese Journal of Applied Physics (01.03.2017)
Published in Japanese Journal of Applied Physics (01.03.2017)
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Journal Article
High Power LPP-EUV Source with Long Collector Mirror Lifetime for Semiconductor High Volume Manufacturing
Mizoguchi, Hakaru, Nakarai, Hiroaki, Abe, Tamotsu, Tanaka, Hiroshi, Watanabe, Yukio, Hori, Tsukasa, Kodama, Takeshi, Shiraishi, Yutaka, Yanagida, Tatsuya, Soumagne, Georg, Yamada, Tsuyoshi, Saitou, Takashi
Published in Journal of Photopolymer Science and Technology (24.06.2019)
Published in Journal of Photopolymer Science and Technology (24.06.2019)
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Journal Article
Phase Changes of 4H-SiC in Excimer Laser Doping
Usami, Yasutsugu, Imokawa, Kaname, Nohdomi, Ryoichi, Sunahara, Atsushi, Mizoguchi, Hakaru
Published in Journal of electronic materials (01.07.2022)
Published in Journal of electronic materials (01.07.2022)
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Journal Article
Adaptation of TCAD simulation in excimer laser doping
Usami, Yasutsugu, Imokawa, Kaname, Nohdomi, Ryoichi, Sunahara, Atsushi, Mizoguchi, Hakaru
Published in Japanese Journal of Applied Physics (01.08.2021)
Published in Japanese Journal of Applied Physics (01.08.2021)
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Journal Article
Synthesis of arbitrary pulse waveforms in QCL-seeded ns-pulse CO 2 laser for optimization of an LPP EUV source
Nowak, Krzysztof M, Kurosawa, Yoshiaki, Suganuma, Takashi, Kawasuji, Yasufumi, Nakarai, Hiroaki, Saito, Takashi, Fujimoto, Junichi, Mizoguchi, Hakaru
Published in Optics letters (01.07.2016)
Published in Optics letters (01.07.2016)
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Journal Article
Development of a collective Thomson scattering system for laser-produced tin plasmas for extreme-ultraviolet light sources
Tomita, Kentaro, Sato, Yuta, Nishikawa, Kazutaka, Uchino, Kiichiro, Yanagida, Tatsuya, Tomuro, Hiroaki, Wada, Yasunori, Kunishima, Masahito, Kodama, Takeshi, Mizoguchi, Hakaru, Sunahara, Atsushi
Published in Applied physics express (01.12.2015)
Published in Applied physics express (01.12.2015)
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Journal Article
Multiline short-pulse solid-state seeded carbon dioxide laser for extreme ultraviolet employing multipass radio frequency excited slab amplifier
Nowak, Krzysztof M, Ohta, Takeshi, Suganuma, Takashi, Fujimoto, Junichi, Mizoguchi, Hakaru
Published in Optics letters (15.03.2013)
Published in Optics letters (15.03.2013)
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Journal Article
Efficient multiline nanosecond pulse amplification in planar waveguide CO₂ amplifier for extreme UV laser-produced plasma source
Nowak, Krzysztof M, Ohta, Takeshi, Suganuma, Takashi, Fujimoto, Junichi, Mizoguchi, Hakaru, Sumitani, Akira, Endo, Akira
Published in Optics letters (01.04.2014)
Published in Optics letters (01.04.2014)
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Journal Article
HIGH-VOLTAGE PULSE GENERATION DEVICE AND CONTROL METHOD OF THE SAME
OKUBO TOMOYUKI, KOU IKA, TSUSHIMA HIROAKI, UMEDA HIROSHI, MIZOGUCHI HAKARU, MATSUNAGA TAKASHI
Year of Publication 03.12.2020
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Year of Publication 03.12.2020
Patent
Dynamics of Output Spectra within a Single Laser Pulse from a Line-Narrowed Excimer Laser
Enami, Tatsuo, Hori, Tsukasa, Ohta, Takeshi, Mizoguchi, Hakaru, Okada, Tatsuo
Published in Japanese Journal of Applied Physics (01.01.2000)
Published in Japanese Journal of Applied Physics (01.01.2000)
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Journal Article
Performance Improvement of a Discharge-Pumped ArF Excimer Laser by Xenon Gas Addition
Kataoka, Naoki, Itagaki, Motoya, Uchino, Kiichiro, Muraoka, Katsunori, Takahashi, Akihiko, Okada, Tatsuo, Maeda, Mitsuo, Hori, Tsukasa, Terashima, Katsutomo, Sumitani, Akira, Enami, Tatsuo, Mizoguchi, Hakaru
Published in Japanese Journal of Applied Physics (01.12.1999)
Published in Japanese Journal of Applied Physics (01.12.1999)
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Journal Article