Near Edge X-Ray Absorption Fine Structure Study for Optimization of Hard Diamond-Like Carbon Film Formation with Ar Cluster Ion Beam
Kitagawa, Teruyuki, Miyauchi, Kazuya, Kanda, Kazuhiro, Shimizugawa, Yutaka, Toyoda, Noriaki, Tsubakino, Harushige, Matsui, Shinji, Matsuo, Jiro, Yamada, Isao
Published in Japanese Journal of Applied Physics (2003)
Published in Japanese Journal of Applied Physics (2003)
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Journal Article
Influence of residual Ar + in Ar cluster ion beam for DLC film formation
Kitagawa, Teruyuki, Miyauchi, Kazuya, Toyoda, Noriaki, Kanda, Kazuhiro, Ikeda, Tokumi, Tsubakino, Harushige, Matsuo, Jiro, Matsui, Shinji, Yamada, Isao
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.05.2003)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.05.2003)
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Journal Article