Microelectromechanical Systems Resonator Utilizing Torsional-to-Transverse Vibration Conversion
Kiso, Masaya, Okada, Mitsuhiro, Tamano, Akimasa, Fujiura, Hideaki, Miyauchi, Hideo, Niki, Kazuya, Tanigawa, Hiroshi, Suzuki, Kenichiro
Published in Japanese Journal of Applied Physics (01.06.2011)
Published in Japanese Journal of Applied Physics (01.06.2011)
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Journal Article
High Quality Factor 80 MHz Microelectromechanical Systems Resonator Utilizing Torsional-to-Transverse Vibration Conversion
Kiso, Masaya, Okada, Mitsuhiro, Fujiura, Hideaki, Miyauchi, Hideo, Niki, Kazuya, Tanigawa, Hiroshi, Suzuki, Kenichiro
Published in Japanese Journal of Applied Physics (01.06.2012)
Published in Japanese Journal of Applied Physics (01.06.2012)
Get full text
Journal Article
High Quality Factor 80 MHz Microelectromechanical Systems Resonator Utilizing Torsional-to-Transverse Vibration Conversion
Kiso, Masaya, Okada, Mitsuhiro, Fujiura, Hideaki, Miyauchi, Hideo, Niki, Kazuya, Tanigawa, Hiroshi, Suzuki, Kenichiro
Published in Japanese Journal of Applied Physics (01.06.2012)
Published in Japanese Journal of Applied Physics (01.06.2012)
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Journal Article
Effect of oxygen concentration on the chemical behavior of deuterium implanted into oxygen-containing boron thin films
Yoshikawa, Akira, Oyaidzu, Makoto, Miyauchi, Hideo, Oya, Yasuhisa, Sagara, Akio, Noda, Nobuaki, Okuno, Kenji
Published in Journal of nuclear materials (01.08.2007)
Published in Journal of nuclear materials (01.08.2007)
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Conference Proceeding
Microelectromechanical Systems Resonator Utilizing Torsional-to-Transverse Vibration Conversion
Kiso, Masaya, Okada, Mitsuhiro, Tamano, Akimasa, Fujiura, Hideaki, Miyauchi, Hideo, Niki, Kazuya, Tanigawa, Hiroshi, Suzuki, Kenichiro
Published in Japanese Journal of Applied Physics (01.06.2011)
Published in Japanese Journal of Applied Physics (01.06.2011)
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Journal Article
Effects of helium implantation on hydrogen isotope retention behavior in SiC
Oya, Yasuhisa, Miyauchi, Hideo, Suda, Taichi, Nishikawa, Yusuke, Oda, Takuji, Okuno, Kenji, Tanaka, Satoru
Published in Journal of nuclear materials (15.06.2007)
Published in Journal of nuclear materials (15.06.2007)
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Journal Article
Conference Proceeding
Temperature dependence of hydrogen isotope behaviors in non-He + pre-implanted SiC and He + pre-implanted SiC
Oya, Yasuhisa, Miyauchi, Hideo, Suda, Taichi, Nishikawa, Yusuke, Yoshikawa, Akira, Tanaka, Satoru, Okuno, Kenji
Published in Fusion engineering and design (01.10.2007)
Published in Fusion engineering and design (01.10.2007)
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Journal Article
Conference Proceeding
Effects of implantation conditions on retention behavior of deuterrium in highly oriented pyrolytic graphite
Suda, Taichi, Miyauchi, Hideo, Yoshikawa, Akira, Kimura, Hiromi, Oya, Yasuhisa, Okuno, Kenji
Published in Fusion engineering and design (01.10.2007)
Published in Fusion engineering and design (01.10.2007)
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Journal Article
Conference Proceeding