Blade Wear and Wafer Chipping in Dicing Processes
MIWA, Toshiharu, INASAKI, Ichiro, YUKAWA, Isao
Published in Transactions of the Japan Society of Mechanical Engineers Series C (25.02.1999)
Published in Transactions of the Japan Society of Mechanical Engineers Series C (25.02.1999)
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Journal Article
Automated stepper load balance allocation system
Miwa, T., Nishihara, N., Yamamoto, K.
Published in IEEE transactions on semiconductor manufacturing (01.11.2005)
Published in IEEE transactions on semiconductor manufacturing (01.11.2005)
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Journal Article
Input plan optimization system for the high mix low volume factory of the semiconductor manufacturing
Kamoda, K, Miwa, T, Fujiwara, S, Chida, T, Nishihara, N
Published in 2010 International Symposium on Semiconductor Manufacturing (ISSM) (01.10.2010)
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Published in 2010 International Symposium on Semiconductor Manufacturing (ISSM) (01.10.2010)
Conference Proceeding
Focus and CD Control by Scatterometry Measurements for 65/45 nm Node Devices
Kawachi, T., Fudo, H., Yamashita, S., Narimatsu, K., Yamamoto, K., Miwa, T., Matsumoto, S.
Published in IEEE transactions on semiconductor manufacturing (01.11.2009)
Published in IEEE transactions on semiconductor manufacturing (01.11.2009)
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Journal Article
Conference Proceeding