밸브 장치, 유체 제어 장치 및 밸브 장치의 제조 방법
NAKATA TOMOHIRO, MIURA TAKERU, YAKUSHIJIN TADAYUKI, HARADA AKIHIRO, ISHIBASHI KEISUKE, YAMAJI MICHIO
Year of Publication 14.02.2022
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Year of Publication 14.02.2022
Patent
Shear modulus of solid helium-4 confined in a 10μm gap
Aoki, Yuki, Iwasa, Izumi, Miura, Takeru, Yamaguchi, Akira, Okuda, Yuichi
Published in Physica. B, Condensed matter (01.02.2016)
Published in Physica. B, Condensed matter (01.02.2016)
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Journal Article
VALVE DEVICE, FLUID CONTROL DEVICE, AND METHOD FOR MANUFACTURING VALVE DEVICE
NAKATA, Tomohiro, HARADA, Akihiro, MIURA, Takeru, YAKUSHIJIN, Tadayuki, ISHIBASHI, Keisuke, YAMAJI, Michio
Year of Publication 04.02.2021
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Year of Publication 04.02.2021
Patent
밸브 장치
YOSHIDA TOSHIHIDE, NAKATA TOMOHIRO, MIURA TAKERU, SHINOHARA TSUTOMU, NAKAZAWA MASAHIKO, KONDO KENTA, TAKIMOTO MASAHIKO
Year of Publication 16.10.2020
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Year of Publication 16.10.2020
Patent
가스 공급 시스템
MIURA TAKERU, NAKATA TOMOHIRO, KONDO KENTA, SATO HIDENOBU, INADA TOSHIYUKI, WATANABE KAZUNARI
Year of Publication 25.03.2020
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Year of Publication 25.03.2020
Patent
액추에이터, 밸브, 유체 공급 시스템 및 반도체 제조 장치
MIURA TAKERU, NAKATA TOMOHIRO, SHINOHARA TSUTOMU, KONDO KENTA, SATO HIDENOBU, INADA TOSHIYUKI, WATANABE KAZUNARI, YUHARA TOMOKO
Year of Publication 11.02.2020
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Year of Publication 11.02.2020
Patent
액추에이터, 밸브 및 반도체 제조 장치
MIURA TAKERU, NAKATA TOMOHIRO, SHINOHARA TSUTOMU, KONDO KENTA, SATO HIDENOBU, INADA TOSHIYUKI, WATANABE KAZUNARI, YUHARA TOMOKO
Year of Publication 23.01.2020
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Year of Publication 23.01.2020
Patent
VALVE DEVICE
KONDO Kenta, MIURA Takeru, NAKAZAWA Masahiko, SHINOHARA Tsutomu, TAKIMOTO Masahiko, YOSHIDA Toshihide, NAKATA Tomohiro
Year of Publication 12.09.2019
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Year of Publication 12.09.2019
Patent
GAS SUPPLY SYSTEM
SATO Hidenobu, MIURA Takeru, KONDO Kenta, INADA Toshiyuki, WATANABE Kazunari, NAKATA Tomohiro
Year of Publication 07.02.2019
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Year of Publication 07.02.2019
Patent
ACTUATOR, VALVE, AND SEMICONDUCTOR PRODUCTION DEVICE
NAKATA, Tomohiro, SATO, Hidenobu, YUHARA, Tomoko, MIURA, Takeru, WATANABE, Kazunari, KONDO, Kenta, SHINOHARA, Tsutomu, INADA, Toshiyuki
Year of Publication 10.01.2019
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Year of Publication 10.01.2019
Patent
ACTUATOR, VALVE, FLUID SUPPLY SYSTEM, AND SEMICONDUCTOR PRODUCTION DEVICE
NAKATA, Tomohiro, SATO, Hidenobu, YUHARA, Tomoko, MIURA, Takeru, WATANABE, Kazunari, KONDO, Kenta, SHINOHARA, Tsutomu, INADA, Toshiyuki
Year of Publication 10.01.2019
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Year of Publication 10.01.2019
Patent
Valve device, fluid control device, and manufacturing method of valve device
Miura, Takeru, Yamaji, Michio, Harada, Akihiro, Nakata, Tomohiro, Yakushijin, Tadayuki, Ishibashi, Keisuke
Year of Publication 02.01.2024
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Year of Publication 02.01.2024
Patent
Technical challenges to realize energy-efficient linear metros in Japan
Koseki, Takafumi, Watanabe, Shoichiro, Miura, Takeru, Mizuma, Takeshi, Isobe, Eisuke
Published in 2017 11th International Symposium on Linear Drives for Industry Applications (LDIA) (01.09.2017)
Published in 2017 11th International Symposium on Linear Drives for Industry Applications (LDIA) (01.09.2017)
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Conference Proceeding