Electron boltzmann kinetic equation averaged over fast electron bouncing and pitch-angle scattering for fast modeling of electron cyclotron resonance discharge
Kaganovich, I, I, Misina, M, Berezhnoi, SV, Gijbels, R
Published in Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics (01.02.2000)
Published in Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics (01.02.2000)
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Journal Article
Composition, structure, microhardness and residual stress of W–Ti–N films deposited by reactive magnetron sputtering
Shaginyan, L.R, Mišina, M, Zemek, J, Musil, J, Regent, F, Britun, V.F
Published in Thin solid films (03.04.2002)
Published in Thin solid films (03.04.2002)
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Journal Article
Investigation of the pulsed magnetron discharge by time- and energy-resolved mass spectrometry
Mišina, Martin, Bradley, James W, Bäcker, Hermann, Aranda-Gonzalvo, Yolanda, Karkari, Shantanu K, Forder, Don
Published in Vacuum (31.10.2002)
Published in Vacuum (31.10.2002)
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Journal Article
Plasma diagnostics of low pressure microave-enhanced d.c. sputtering discharge
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Conference Proceeding
Effect of reactive gas pressure on the plasma parameters during triode ion plating of Cr−C films
Maček, Marijan, Čekada, Miha, Panjan, Peter, Mišina, Martin
Published in Czechoslovak journal of physics (01.01.2000)
Published in Czechoslovak journal of physics (01.01.2000)
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Journal Article