Multilayer low reflectivity hard mask and process therefor
Ghandehari, Kouros, Minvielle, Anna M, Plat, Marina V, Tokuno, Hirokazu
Year of Publication 13.11.2012
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Year of Publication 13.11.2012
Patent
Multilayer low reflectivity hard mask and process therefor
Ghandehari, Kouros, Minvielle, Anna M, Plat, Marina V, Tokuno, Hirokazu
Year of Publication 01.11.2011
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Year of Publication 01.11.2011
Patent
Multilayer low reflectivity hard mask and process therefor
Ghandehari, Kouros, Minvielle, Anna M, Plat, Marina V, Tokuno, Hirokazu
Year of Publication 26.05.2009
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Year of Publication 26.05.2009
Patent
Methods for designing grating structures for use in situ scatterometry to detect photoresist defects
PLAT MARINA V, LYONS CHRISTOPHER F, GABRIEL CALVIN T, MINVIELLE ANNA M
Year of Publication 23.09.2008
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Year of Publication 23.09.2008
Patent