Multilayer low reflectivity hard mask and process therefor
Ghandehari, Kouros, Minvielle, Anna M, Plat, Marina V, Tokuno, Hirokazu
Year of Publication 13.11.2012
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Year of Publication 13.11.2012
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Multilayer low reflectivity hard mask and process therefor
Ghandehari, Kouros, Minvielle, Anna M, Plat, Marina V, Tokuno, Hirokazu
Year of Publication 01.11.2011
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Year of Publication 01.11.2011
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Multilayer low reflectivity hard mask and process therefor
Ghandehari, Kouros, Minvielle, Anna M, Plat, Marina V, Tokuno, Hirokazu
Year of Publication 26.05.2009
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Year of Publication 26.05.2009
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METHOD OF FORMING NARROWLY SPACED FLASH MEMORY CONTACT OPENINGS
CHENG NING, LINGUNIS EMMANUIL H, GHANDEHARI KOUROS, MINVIELLE ANNA, RAMSBEY MARK, KIM HUNG-EIL
Year of Publication 15.07.2010
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Year of Publication 15.07.2010
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Method of forming narrowly spaced flash memory contact openings and lithography masks
Lingunis, Emmanuil H, Cheng, Ning, Ramsbey, Mark, Ghandehari, Kouros, Minvielle, Anna, Kim, Hung-Eil
Year of Publication 24.03.2009
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Year of Publication 24.03.2009
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Method of forming narrowly spaced flash memory contact openings and lithography masks
CHENG NING, LINGUNIS EMMANUIL H, GHANDEHARI KOUROS, MINVIELLE ANNA, RAMSBEY MARK, KIM HUNG-EIL
Year of Publication 24.03.2009
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Year of Publication 24.03.2009
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Methods for designing grating structures for use in situ scatterometry to detect photoresist defects
PLAT MARINA V, LYONS CHRISTOPHER F, GABRIEL CALVIN T, MINVIELLE ANNA M
Year of Publication 23.09.2008
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Year of Publication 23.09.2008
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