VALVE MANIFOLD DEADLEG ELIMINATION VIA REENTRANT FLOW PATH
SANGPLUNG SAANGRUT, BALDASSERONI CHLOE, PASQUALE FRANK, SWAMINATHAN SHANKAR, LEESER KARL, MINSHALL TED, LAVOIE ADRIEN
Year of Publication 05.12.2022
Get full text
Year of Publication 05.12.2022
Patent
SYSTEMS AND METHODS FOR SUPPRESSING PARASITIC PLASMA AND REDUCING WITHIN-WAFER NON-UNIFORMITY
KANG HU, BALDASSERONI CHLOE, PASQUALE FRANK, VARADARAJAN SESHA, MINSHALL TED, LEESER KARL, AUGUSTYNIAK EDWARD, KEIL DOUGLAS, SMITH DAVID, DUVALL ANDREW, PETRAGLIA JENNIFER, SWAMINATHAN SHANKAR, LAVOIE ADRIEN, QIAN JUN
Year of Publication 10.12.2021
Get full text
Year of Publication 10.12.2021
Patent
VALVE MANIFOLD DEADLEG ELIMINATION VIA REENTRANT FLOW PATH
SANGPLUNG SAANGRUT, BALDASSERONI CHLOE, PASQUALE FRANK, SWAMINATHAN SHANKAR, LEESER KARL, MINSHALL TED, LAVOIE ADRIEN
Year of Publication 03.06.2016
Get full text
Year of Publication 03.06.2016
Patent
SYSTEMS AND METHODS FOR SUPPRESSING PARASITIC PLASMA AND REDUCING WITHIN-WAFER NON-UNIFORMITY
KANG HU, BALDASSERONI CHLOE, PASQUALE FRANK, VARADARAJAN SESHA, MINSHALL TED, LEESER KARL, AUGUSTYNIAK EDWARD, KEIL DOUGLAS, SMITH DAVID, DUVALL ANDREW, PETRAGLIA JENNIFER, SWAMINATHAN SHANKAR, LAVOIE ADRIEN, QIAN JUN
Year of Publication 22.03.2016
Get full text
Year of Publication 22.03.2016
Patent
Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity
Keil, Douglas, Duvall, Andrew, Minshall, Ted, Varadarajan, Sesha, Smith, David, LaVoie, Adrien, Baldasseroni, Chloe, Augustyniak, Edward, Leeser, Karl, Pasquale, Frank, Qian, Jun, Petraglia, Jennifer, Kang, Hu, Swaminathan, Shankar
Year of Publication 21.09.2021
Get full text
Year of Publication 21.09.2021
Patent
SYSTEMS AND METHODS FOR SUPPRESSING PARASITIC PLASMA AND REDUCING WITHIN-WAFER NON-UNIFORMITY
Keil, Douglas, Duvall, Andrew, Minshall, Ted, Varadarajan, Sesha, Smith, David, LaVoie, Adrien, Baldasseroni, Chloe, Augustyniak, Edward, Leeser, Karl, Pasquale, Frank, Qian, Jun, Petraglia, Jennifer, Kang, Hu, Swaminathan, Shankar
Year of Publication 22.10.2020
Get full text
Year of Publication 22.10.2020
Patent
Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity
Keil, Douglas, Duvall, Andrew, Minshall, Ted, Varadarajan, Sesha, Smith, David, LaVoie, Adrien, Baldasseroni, Chloe, Augustyniak, Edward, Leeser, Karl, Pasquale, Frank, Qian, Jun, Petraglia, Jennifer, Kang, Hu, Swaminathan, Shankar
Year of Publication 26.05.2020
Get full text
Year of Publication 26.05.2020
Patent
Valve manifold deadleg elimination via reentrant flow path
LaVoie Adrien, Leeser Karl, Baldasseroni Chloe, Minshall Ted, Pasquale Frank, Sangplung Saangrut, Swaminathan Shankar
Year of Publication 20.03.2018
Get full text
Year of Publication 20.03.2018
Patent
Wafer centering in pocket to improve azimuthal thickness uniformity at wafer edge
Chandrasekharan Ramesh, Baldasseroni Chloe, Minshall Ted, Swaminathan Shankar, Pasquale Frank L
Year of Publication 04.07.2017
Get full text
Year of Publication 04.07.2017
Patent
VALVE MANIFOLD DEADLEG ELIMINATION VIA REENTRANT FLOW PATH
SANGPLUNG SAANGRUT, BALDASSERONI CHLOE, PASQUALE FRANK, SWAMINATHAN SHANKAR, LEESER KARL, MINSHALL TED, LAVOIE ADRIEN
Year of Publication 26.05.2016
Get full text
Year of Publication 26.05.2016
Patent
SYSTEMS AND METHODS FOR SUPPRESSING PARASITIC PLASMA AND REDUCING WITHIN-WAFER NON-UNIFORMITY
Qian Jun, LaVoie Adrien, Smith David, Leeser Karl, Minshall Ted, Varadarajan Sesha, Duvall Andrew, Keil Douglas, Kang Hu, Petraglia Jennifer, Baldasseroni Chloe, Pasquale Frank, Swaminathan Shankar, Augustyniak Edward
Year of Publication 08.03.2018
Get full text
Year of Publication 08.03.2018
Patent
Gas delivery system for a substrate processing system
PASQUALE, FRANK, LEESER, KARL, MINSHALL, TED, LAVOIE, ADRIEN, SANGPLUNG, SAANGRUT, SWAMINATHAN, SHANKAR, BALDASSERONI, CHLOE
Year of Publication 21.12.2020
Get full text
Year of Publication 21.12.2020
Patent
Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity
Qian Jun, LaVoie Adrien, Smith David, Leeser Karl, Minshall Ted, Varadarajan Sesha, Duvall Andrew, Keil Douglas, Kang Hu, Petraglia Jennifer, Baldasseroni Chloe, Pasquale Frank, Swaminathan Shankar, Augustyniak Edward
Year of Publication 17.10.2017
Get full text
Year of Publication 17.10.2017
Patent