Atomic Layer Deposition of PbS Thin Films at Low Temperatures
Popov, Georgi, Bačić, Goran, Mattinen, Miika, Manner, Toni, Lindström, Hannu, Seppänen, Heli, Suihkonen, Sami, Vehkamäki, Marko, Kemell, Marianna, Jalkanen, Pasi, Mizohata, Kenichiro, Räisänen, Jyrki, Leskelä, Markku, Koivula, Hanna Maarit, Barry, Seán T, Ritala, Mikko
Published in Chemistry of materials (13.10.2020)
Published in Chemistry of materials (13.10.2020)
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Journal Article
Atomic force microscopy study of titanium dioxide thin films grown by atomic layer epitaxy
Ritala, Mikko, Leskelä, Markku, Johansson, Leena-Sisko, Niinistö, Lauri
Published in Thin solid films (15.05.1993)
Published in Thin solid films (15.05.1993)
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Journal Article
Conference Proceeding
Role of ALD Al2O3 Surface Passivation on the Performance of p‑Type Cu2O Thin Film Transistors
Napari, Mari, Huq, Tahmida N, Meeth, David J, Heikkilä, Mikko J, Niang, Kham M, Wang, Han, Iivonen, Tomi, Wang, Haiyan, Leskelä, Markku, Ritala, Mikko, Flewitt, Andrew J, Hoye, Robert L. Z, MacManus-Driscoll, Judith L
Published in ACS applied materials & interfaces (27.01.2021)
Published in ACS applied materials & interfaces (27.01.2021)
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Journal Article
Diamine Adduct of Cobalt(II) Chloride as a Precursor for Atomic Layer Deposition of Stoichiometric Cobalt(II) Oxide and Reduction Thereof to Cobalt Metal Thin Films
Väyrynen, Katja, Hatanpää, Timo, Mattinen, Miika, Heikkilä, Mikko, Mizohata, Kenichiro, Meinander, Kristoffer, Räisänen, Jyrki, Ritala, Mikko, Leskelä, Markku
Published in Chemistry of materials (22.05.2018)
Published in Chemistry of materials (22.05.2018)
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Journal Article
Lithium Phosphate Thin Films Grown by Atomic Layer Deposition
Hämäläinen, Jani, Holopainen, Jani, Munnik, Frans, Hatanpää, Timo, Heikkilä, Mikko, Ritala, Mikko, Leskelä, Markku
Published in Journal of the Electrochemical Society (01.01.2012)
Published in Journal of the Electrochemical Society (01.01.2012)
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Journal Article
Atomic Layer Deposition of Boron‐Doped Al 2 O 3 Dielectric Films
Li, Xinzhi, Vehkamäki, Marko, Chundak, Mykhailo, Mizohata, Kenichiro, Vihervaara, Anton, Leskelä, Markku, Putkonen, Matti, Ritala, Mikko
Published in Advanced materials interfaces (01.06.2023)
Published in Advanced materials interfaces (01.06.2023)
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Journal Article
Double metal alkoxides of lithium: Synthesis, structure and applications in materials chemistry
Mäntymäki, Miia, Ritala, Mikko, Leskelä, Markku
Published in Coordination chemistry reviews (01.05.2012)
Published in Coordination chemistry reviews (01.05.2012)
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Journal Article
Thin film deposition methods for CuInSe2 solar cells
KEMELL, Marianna, RITALA, Mikko, LESKELÄ, Markku
Published in Critical reviews in solid state and materials sciences (2005)
Published in Critical reviews in solid state and materials sciences (2005)
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Journal Article
Novel ALD Process for Depositing CaF2 Thin Films
Pilvi, Tero, Arstila, Kai, Leskelä, Markku, Ritala, Mikko
Published in Chemistry of materials (10.07.2007)
Published in Chemistry of materials (10.07.2007)
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Journal Article
Highly dispersed atomic layer deposited CrOx on SiO2 catalyst with enhanced yield of propylene for CO2 –mediated oxidative dehydrogenation of propane
Gashoul Daresibi, Fatemeh, Khodadadi, Abbas Ali, Mortazavi, Yadollah, Huotari, Simo, Ritala, Mikko
Published in Molecular catalysis (01.06.2022)
Published in Molecular catalysis (01.06.2022)
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Journal Article
Atomic Layer Deposition of Emerging 2D Semiconductors, HfS 2 and ZrS 2 , for Optoelectronics
Mattinen, Miika, Popov, Georgi, Vehkamäki, Marko, King, Peter J., Mizohata, Kenichiro, Jalkanen, Pasi, Räisänen, Jyrki, Leskelä, Markku, Ritala, Mikko
Published in Chemistry of materials (13.08.2019)
Published in Chemistry of materials (13.08.2019)
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Journal Article
METAL THIN-FILM DOSIMETRY TECHNOLOGY FOR THE ULTRA-HIGH PARTICLE FLUENCE ENVIRONMENT OF THE FUTURE CIRCULAR COLLIDER AT CERN
Gorine, Georgi, Pezzullo, Giuseppe, Moll, Michael, Capeans, Mar, Väyrynen, Katja, Ritala, Mikko, Bouvet, Didier, Ravotti, Federico, Sallese, Jean-Michel
Published in RAD Association Journal (2019)
Published in RAD Association Journal (2019)
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Journal Article
Novel electroblowing synthesis of tin dioxide and composite tin dioxide/silicon dioxide submicron fibers for cobalt() uptake
Paajanen, Johanna, Weintraub, Saara, Lönnrot, Satu, Heikkilä, Mikko, Vehkamäki, Marko, Kemell, Marianna, Hatanpää, Timo, Ritala, Mikko, Koivula, Risto
Published in RSC advances (23.04.2021)
Published in RSC advances (23.04.2021)
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Journal Article
Zeolitic imidazole Framework-8 (ZIF-8) fibers by gas-phase conversion of electroblown zinc oxide and aluminum doped zinc oxide fibers
Holopainen, Jani, Heikkilä, Mikko J., Salmi, Leo D., Ainassaari, Kaisu, Ritala, Mikko
Published in Microporous and mesoporous materials (01.09.2018)
Published in Microporous and mesoporous materials (01.09.2018)
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Journal Article
Atomic layer deposition of PbCl 2 , PbBr 2 and mixed lead halide (Cl, Br, I) PbX n Y 2− n thin films
Popov, Georgi, Bačić, Goran, Van Dijck, Charlotte, Junkers, Laura S., Weiß, Alexander, Mattinen, Miika, Vihervaara, Anton, Chundak, Mykhailo, Jalkanen, Pasi, Mizohata, Kenichiro, Leskelä, Markku, Masuda, Jason D., Barry, Seán T., Ritala, Mikko, Kemell, Marianna
Published in Dalton transactions : an international journal of inorganic chemistry (11.10.2022)
Published in Dalton transactions : an international journal of inorganic chemistry (11.10.2022)
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Journal Article
Tantalum oxide nanocoatings prepared by atomic layer and filtered cathodic arc deposition for corrosion protection of steel: Comparative surface and electrochemical analysis
Díaz, Belén, Światowska, Jolanta, Maurice, Vincent, Seyeux, Antoine, Härkönen, Emma, Ritala, Mikko, Tervakangas, Sanna, Kolehmainen, Jukka, Marcus, Philippe
Published in Electrochimica acta (15.02.2013)
Published in Electrochimica acta (15.02.2013)
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Journal Article
Controlling Atomic Layer Deposition of 2D Semiconductor SnS2 by the Choice of Substrate
Mattinen, Miika, King, Peter J., Brüner, Philipp, Leskelä, Markku, Ritala, Mikko
Published in Advanced materials interfaces (01.10.2020)
Published in Advanced materials interfaces (01.10.2020)
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Journal Article
Method and system for depositing transition metal carbide
MATTI PUTKONEN, TIMO HATANPAA, PALOMA RUIZ Y KARKKAINEN, MIKKO RITALA, ANTON VIHERVAARA
Year of Publication 22.08.2024
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Year of Publication 22.08.2024
Patent
Atomic layer deposition of lanthanum oxide with heteroleptic cyclopentadienyl-amidinate lanthanum precursor - Effect of the oxygen source on the film growth and properties
Seppälä, Sanni, Niinistö, Jaakko, Mattinen, Miika, Mizohata, Kenichiro, Räisänen, Jyrki, Noh, Wontae, Ritala, Mikko, Leskelä, Markku
Published in Thin solid films (30.08.2018)
Published in Thin solid films (30.08.2018)
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Journal Article