ALD of Metal Fluorides–Potential Applications and Current State
Atosuo, Elisa, Mäntymäki, Miia, Ritala, Mikko
Published in Advanced materials interfaces (15.10.2024)
Published in Advanced materials interfaces (15.10.2024)
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Journal Article
Atomic Layer Deposition of Rhenium Disulfide
Hämäläinen, Jani, Mattinen, Miika, Mizohata, Kenichiro, Meinander, Kristoffer, Vehkamäki, Marko, Räisänen, Jyrki, Ritala, Mikko, Leskelä, Markku
Published in Advanced materials (Weinheim) (01.06.2018)
Published in Advanced materials (Weinheim) (01.06.2018)
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Journal Article
Fully Automated Online Dynamic In-Tube Extraction for Continuous Sampling of Volatile Organic Compounds in Air
Lan, Hangzhen, Holopainen, Jani, Hartonen, Kari, Jussila, Matti, Ritala, Mikko, Riekkola, Marja-Liisa
Published in Analytical chemistry (Washington) (02.07.2019)
Published in Analytical chemistry (Washington) (02.07.2019)
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Journal Article
Atomic Layer Deposition of PbI2 Thin Films
Popov, Georgi, Mattinen, Miika, Hatanpää, Timo, Vehkamäki, Marko, Kemell, Marianna, Mizohata, Kenichiro, Räisänen, Jyrki, Ritala, Mikko, Leskelä, Markku
Published in Chemistry of materials (12.02.2019)
Published in Chemistry of materials (12.02.2019)
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Journal Article
Free-standing inductive grid filter for infrared radiation rejection
Jefimovs, Konstantins, Laukkanen, Janne, Vallius, Tuomas, Pilvi, Tero, Ritala, Mikko, Meilahti, Tomi, Kaipiainen, Matti, Bavdaz, Marcos, Leskelä, Markku, Turunen, Jari
Published in Microelectronic engineering (01.04.2006)
Published in Microelectronic engineering (01.04.2006)
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Journal Article
Conference Proceeding
Corrosion protection of aluminium by ultra-thin atomic layer deposited alumina coatings
Mirhashemihaghighi, Shadi, Światowska, Jolanta, Maurice, Vincent, Seyeux, Antoine, Zanna, Sandrine, Salmi, Emma, Ritala, Mikko, Marcus, Philippe
Published in Corrosion science (01.05.2016)
Published in Corrosion science (01.05.2016)
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Journal Article
Highly conductive and stable Co 9 S 8 thin films by atomic layer deposition: from process development and film characterization to selective and epitaxial growth
Mattinen, Miika, Hatanpää, Timo, Mizohata, Kenichiro, Räisänen, Jyrki, Leskelä, Markku, Ritala, Mikko
Published in Dalton transactions : an international journal of inorganic chemistry (05.10.2021)
Published in Dalton transactions : an international journal of inorganic chemistry (05.10.2021)
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Journal Article
Atomic Layer Deposition of CsI and CsPbI 3
Weiß, Alexander, Popov, Georgi, Atosuo, Elisa, Vihervaara, Anton, Jalkanen, Pasi, Vehkamäki, Marko, Leskelä, Markku, Ritala, Mikko, Kemell, Marianna
Published in Chemistry of materials (12.07.2022)
Published in Chemistry of materials (12.07.2022)
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Journal Article
Area-Selective Etching of Poly(methyl methacrylate) Films by Catalytic Decomposition
Lasonen, Valtteri, Vihervaara, Anton, Popov, Georgi, Tois, Eva, Mester, Lars, Karimi, Mohammad, Ilarionova, Yoana, Jafari Jam, Reza, Sundqvist, Jonas, Ritala, Mikko
Published in Chemistry of materials (08.08.2023)
Published in Chemistry of materials (08.08.2023)
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Journal Article
Niobium Oxide Thin Films Grown by Atomic Layer Epitaxy
Kukli, Kaupo, Ritala, Mikko, Leskelä, Markku, Lappalainen, Reijo
Published in Chemical vapor deposition (01.01.1998)
Published in Chemical vapor deposition (01.01.1998)
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Journal Article
3D-printed sensor electric circuits using atomic layer deposition
Kestilä, Antti, Vehkamäki, Marko, Nyman, Leo, Salmi, Mika, Lohilahti, Jarkko, Hatanpää, Timo, Lafont, Ugo, Ritala, Mikko
Published in Sensors and actuators. A. Physical. (01.05.2024)
Published in Sensors and actuators. A. Physical. (01.05.2024)
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Journal Article
Low-Temperature Atomic Layer Deposition of Low-Resistivity Copper Thin Films Using Cu(dmap)2 and Tertiary Butyl Hydrazine
Väyrynen, Katja, Mizohata, Kenichiro, Räisänen, Jyrki, Peeters, Daniel, Devi, Anjana, Ritala, Mikko, Leskelä, Markku
Published in Chemistry of materials (08.08.2017)
Published in Chemistry of materials (08.08.2017)
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Journal Article