Atomic Layer Deposition of Platinum Thin Films
Aaltonen, Titta, Ritala, Mikko, Sajavaara, Timo, Keinonen, Juhani, Leskelä, Markku
Published in Chemistry of materials (06.05.2003)
Published in Chemistry of materials (06.05.2003)
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Journal Article
Atomic Layer Deposition of Boron‐Doped Al2O3 Dielectric Films
Li, Xinzhi, Vehkamäki, Marko, Chundak, Mykhailo, Mizohata, Kenichiro, Vihervaara, Anton, Leskelä, Markku, Putkonen, Matti, Ritala, Mikko
Published in Advanced materials interfaces (01.06.2023)
Published in Advanced materials interfaces (01.06.2023)
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Journal Article
Atomic layer deposition and characterization of vanadium oxide thin films
Blanquart, Timothee, Niinistö, Jaakko, Gavagnin, Marco, Longo, Valentino, Heikkilä, Mikko, Puukilainen, Esa, Pallem, Venkateswara R., Dussarrat, Christian, Ritala, Mikko, Leskelä, Markku
Published in RSC advances (01.01.2013)
Published in RSC advances (01.01.2013)
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Journal Article
Atomic Layer Deposition of Nanostructured TiO2 Photocatalysts via Template Approach
Kemell, Marianna, Pore, Viljami, Tupala, Jere, Ritala, Mikko, Leskelä, Markku
Published in Chemistry of materials (03.04.2007)
Published in Chemistry of materials (03.04.2007)
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Journal Article
Effect of thickness of ALD grown TiO2 films on photoelectrocatalysis
Heikkilä, Mikko, Puukilainen, Esa, Ritala, Mikko, Leskelä, Markku
Published in Journal of photochemistry and photobiology. A, Chemistry. (20.05.2009)
Published in Journal of photochemistry and photobiology. A, Chemistry. (20.05.2009)
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Journal Article
Atomic Layer Deposition of AlF3 Thin Films Using Halide Precursors
Mäntymäki, Miia, Heikkilä, Mikko J, Puukilainen, Esa, Mizohata, Kenichiro, Marchand, Benoît, Räisänen, Jyrki, Ritala, Mikko, Leskelä, Markku
Published in Chemistry of materials (27.01.2015)
Published in Chemistry of materials (27.01.2015)
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Journal Article
Oxidative MLD of Conductive PEDOT Thin Films with EDOT and ReCl5 as Precursors
Ghafourisaleh, Saba, Popov, Georgi, Leskelä, Markku, Putkonen, Matti, Ritala, Mikko
Published in ACS omega (13.07.2021)
Published in ACS omega (13.07.2021)
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Journal Article
Atomic Layer Deposition in Nanometer-Level Replication of Cellulosic Substances and Preparation of Photocatalytic TiO2/Cellulose Composites
Kemell, Marianna, Pore, Viljami, Ritala, Mikko, Leskelä, Markku, Lindén, Mika
Published in Journal of the American Chemical Society (19.10.2005)
Published in Journal of the American Chemical Society (19.10.2005)
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Journal Article
Effect of polyethylene wax/soy protein-based dispersion barrier coating on the physical, mechanical, and barrier characteristics of paperboards
Marzbani, Pouya, Azadfallah, Mohammad, Yousefzadeh, Maryam, Najafi, Farhood, Pourbabaee, Ahmad Ali, Koivula, Hanna, Ritala, Mikko
Published in JCT research (2021)
Published in JCT research (2021)
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Journal Article
Atomic Layer Deposition of ScF3 and ScxAlyFz Thin Films
Atosuo, Elisa, Heikkilä, Mikko J, Majlund, Johanna, Pesonen, Leevi, Mäntymäki, Miia, Mizohata, Kenichiro, Leskelä, Markku, Ritala, Mikko
Published in ACS omega (12.03.2024)
Published in ACS omega (12.03.2024)
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Journal Article
Conversion of ALD CuO Thin Films into Transparent Conductive p‐Type CuI Thin Films
Weiß, Alexander, Goldmann, Jacqueline, Kettunen, Sakari, Popov, Georgi, Iivonen, Tomi, Mattinen, Miika, Jalkanen, Pasi, Hatanpää, Timo, Leskelä, Markku, Ritala, Mikko, Kemell, Marianna
Published in Advanced materials interfaces (01.01.2023)
Published in Advanced materials interfaces (01.01.2023)
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Journal Article
Passivation of copper surfaces for selective-area ALD using a thiol self-assembled monolayer
Färm, Elina, Vehkamäki, Marko, Ritala, Mikko, Leskelä, Markku
Published in Semiconductor science and technology (01.07.2012)
Published in Semiconductor science and technology (01.07.2012)
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Journal Article
Electroblown titanium dioxide and titanium dioxide/silicon dioxide submicron fibers with and without titania nanorod layer for strontium(II) uptake
Paajanen, Johanna, Pettilä, Lauri, Lönnrot, Satu, Heikkilä, Mikko, Hatanpää, Timo, Ritala, Mikko, Koivula, Risto
Published in Chemical engineering journal advances (15.03.2023)
Published in Chemical engineering journal advances (15.03.2023)
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Journal Article
Deposition of Copper by Plasma-Enhanced Atomic Layer Deposition Using a Novel N‑Heterocyclic Carbene Precursor
Coyle, Jason P, Dey, Gangotri, Sirianni, Eric R, Kemell, Marianna L, Yap, Glenn P. A, Ritala, Mikko, Leskelä, Markku, Elliott, Simon D, Barry, Sean T
Published in Chemistry of materials (09.04.2013)
Published in Chemistry of materials (09.04.2013)
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Journal Article
Scalable Route to the Fabrication of CH3NH3PbI3 Perovskite Thin Films by Electrodeposition and Vapor Conversion
Popov, Georgi, Mattinen, Miika, Kemell, Marianna L, Ritala, Mikko, Leskelä, Markku
Published in ACS omega (31.12.2016)
Published in ACS omega (31.12.2016)
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Journal Article
Molecular Layer Deposition of Pyrrone Thin Films by Oxidative Polymerization
Ghafourisaleh, Saba, Vehkamäki, Marko, Vihervaara, Anton, Zhang, Chao, Heikkilä, Mikko J., Leskelä, Markku, Putkonen, Matti, Ritala, Mikko
Published in Advanced materials interfaces (01.03.2023)
Published in Advanced materials interfaces (01.03.2023)
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Journal Article
Atomic Layer Deposition of Molybdenum Carbide Thin Films
Kärkkäinen, Paloma Ruiz, Popov, Georgi, Hatanpää, Timo, Kemppinen, Antti, Kohopää, Katja, Bagheri, Mohammad, Komsa, Hannu‐Pekka, Heikkilä, Mikko, Mizohata, Kenichiro, Chundak, Mykhailo, Deminskyi, Petro, Vihervaara, Anton, Ribeiro, Mário, Hätinen, Joel, Govenius, Joonas, Putkonen, Matti, Ritala, Mikko
Published in Advanced materials interfaces (01.09.2024)
Published in Advanced materials interfaces (01.09.2024)
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Journal Article
Atomic layer epitaxy - a valuable tool for nanotechnology?
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Journal Article
Conference Proceeding
Atomic Layer Deposition of Photoconductive Cu2O Thin Films
Iivonen, Tomi, Heikkilä, Mikko J, Popov, Georgi, Nieminen, Heta-Elisa, Kaipio, Mikko, Kemell, Marianna, Mattinen, Miika, Meinander, Kristoffer, Mizohata, Kenichiro, Räisänen, Jyrki, Ritala, Mikko, Leskelä, Markku
Published in ACS omega (30.06.2019)
Published in ACS omega (30.06.2019)
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Journal Article