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Year of Publication 23.03.2021
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Alternating hardmasks for tight-pitch line formation
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Year of Publication 03.03.2020
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Hard masks for block patterning
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Year of Publication 09.04.2019
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Self-aligned quadruple patterning (SAQP) for routing layouts including multi-track jogs
Clevenger, Lawrence A, Saulnier, Nicole A, Penny, Christopher J, Quon, Roger A, Burns, Sean D, Colburn, Matthew E, Mignot, Yann A. M, Kanakasabapathy, Sivananda K
Year of Publication 28.01.2020
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Year of Publication 28.01.2020
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Alternating hardmasks for tight-pitch line formation
Arnold, John C, Felix, Nelson M, Liu, Chi-Chun, DeSilva, Anuja E, Mignot, Yann A. M, Sieg, Stuart A
Year of Publication 16.10.2018
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Year of Publication 16.10.2018
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Efficient metal-insulator-metal capacitor
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Year of Publication 02.10.2018
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Year of Publication 02.10.2018
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Hard masks for block patterning
Xu, Yongan, Seshadri, Indira P. V, De Silva, Ekmini A, Estrada-Raygoza, Isabel C, Mignot, Yann A. M
Year of Publication 02.10.2018
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Year of Publication 02.10.2018
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Self aligned conductive lines with relaxed overlay
Clevenger, Lawrence A, Saulnier, Nicole A, Penny, Christopher J, Quon, Roger A, Burns, Sean D, Colburn, Matthew E, Mignot, Yann A. M, Kanakasabapathy, Sivananda K
Year of Publication 27.08.2019
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Year of Publication 27.08.2019
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HARD MASKS FOR BLOCK PATTERNING
Xu, Yongan, Seshadri, Indira P. V, De Silva, Ekmini A, Estrada-Raygoza, Isabel C, Mignot, Yann A. M
Year of Publication 12.07.2018
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Year of Publication 12.07.2018
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HARD MASKS FOR BLOCK PATTERNING
Xu, Yongan, Seshadri, Indira P. V, De Silva, Ekmini A, Estrada-Raygoza, Isabel C, Mignot, Yann A. M
Year of Publication 12.07.2018
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Year of Publication 12.07.2018
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Via formation using sidewall image transfer process to define lateral dimension
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Year of Publication 18.12.2018
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Self aligned conductive lines with relaxed overlay
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Year of Publication 25.09.2018
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Year of Publication 25.09.2018
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Self-aligned quadruple patterning (SAQP) for routing layouts including multi-track jogs
Clevenger, Lawrence A, Saulnier, Nicole A, Penny, Christopher J, Quon, Roger A, Burns, Sean D, Colburn, Matthew E, Mignot, Yann A. M, Kanakasabapathy, Sivananda K
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Year of Publication 05.06.2018
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Aligning conductive vias with trenches
Clevenger, Lawrence A, Penny, Christopher J, Quon, Roger A, Burns, Sean D, Colburn, Matthew E, Saulnier, Nicole, Mignot, Yann A. M, Kanakasabapathy, Sivananda K
Year of Publication 15.05.2018
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Year of Publication 15.05.2018
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