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Year of Publication 01.01.2013
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Year of Publication 09.10.2012
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Year of Publication 09.10.2012
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Apparatuses for atomic layer deposition
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Year of Publication 01.01.2013
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Year of Publication 01.01.2013
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Methods for atomic layer deposition of hafnium-containing high-K dielectric materials
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Year of Publication 09.10.2012
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Year of Publication 09.10.2012
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Gas manifolds for use during epitaxial film formation
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Year of Publication 09.03.2010
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Year of Publication 09.03.2010
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Gas manifolds for use during epitaxial film formation
ISHIKAWA DAVID, ZOJAJI ALI, SAMOILOV ARKADII V, METZNER CRAIG R, KIM YIHWAN
Year of Publication 09.03.2010
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Year of Publication 09.03.2010
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