Work function adjustment in high-K metal gate electrode structures by selectively removing a barrier layer
LENSKI MARKUS, BINDER ROBERT, METZGER JOACHIM, HEMPEL KLAUS, SCHROEDER VIVIEN
Year of Publication 14.05.2013
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Year of Publication 14.05.2013
Patent
WORK FUNCTION ADJUSTMENT IN HIGH-K METAL GATE ELECTRODE STRUCTURES BY SELECTIVELY REMOVING A BARRIER LAYER
LENSKI MARKUS, BINDER ROBERT, METZGER JOACHIM, HEMPEL KLAUS, SCHROEDER VIVIEN
Year of Publication 17.01.2013
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Year of Publication 17.01.2013
Patent
Work function adjustment in high-k metal gate electrode structures by selectively removing a barrier layer
LENSKI MARKUS, BINDER ROBERT, METZGER JOACHIM, HEMPEL KLAUS, SCHROEDER VIVIEN
Year of Publication 30.10.2012
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Year of Publication 30.10.2012
Patent