MRCC MODULAR RECIPE CONTROLLED CALIBRATIONMODULAR RECIPE CONTROLLED CALIBRATION MRCC APPARATUS USED TO BALANCE PLASMA IN MULTIPLE STATION SYSTEM
FRENCH DAVID, JUCO ELLER Y, METZ DAVID ALAN, HERZIG BRETT, KNIGHT BRIAN, HIESTER JACOB L, LEESER KARL FREDERICK, BINGHAM AARON, KAPOOR SUNIL
Year of Publication 08.10.2021
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Year of Publication 08.10.2021
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복수의 스테이션 시스템에서 플라즈마의 밸런싱을 위해 사용된 MRCC (MODULAR RECIPE CONTROLLED CALIBRATION)
FRENCH DAVID, JUCO ELLER Y, METZ DAVID ALAN, HERZIG BRETT, KNIGHT BRIAN, HIESTER JACOB L, LEESER KARL FREDERICK, BINGHAM AARON, KAPOOR SUNIL
Year of Publication 14.04.2021
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Year of Publication 14.04.2021
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MODULAR RECIPE CONTROLLED CALIBRATION (MRCC) APPARATUS USED TO BALANCE PLASMA IN MULTIPLE STATION SYSTEM
Bingham, Aaron, Hiester, Jacob L, Knight, Brian, Leeser, Karl Frederick, Herzig, Brett, French, David, Kapoor, Sunil, Metz, David Alan, Juco, Eller Y
Year of Publication 03.08.2023
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Year of Publication 03.08.2023
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Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system
Bingham, Aaron, Hiester, Jacob L, Knight, Brian, Leeser, Karl Frederick, Herzig, Brett, French, David, Kapoor, Sunil, Metz, David Alan, Juco, Eller Y
Year of Publication 28.02.2023
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Year of Publication 28.02.2023
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MODULAR RECIPE CONTROLLED CALIBRATION (MRCC) APPARATUS USED TO BALANCE PLASMA IN MULTIPLE STATION SYSTEM
Bingham, Aaron, Hiester, Jacob L, Knight, Brian, Leeser, Karl Frederick, Herzig, Brett, French, David, Kapoor, Sunil, Metz, David Alan, Juco, Eller Y
Year of Publication 01.07.2021
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Year of Publication 01.07.2021
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Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system
Bingham, Aaron, Hiester, Jacob L, Knight, Brian, Leeser, Karl Frederick, Herzig, Brett, French, David, Kapoor, Sunil, Metz, David Alan, Juco, Eller Y
Year of Publication 27.04.2021
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Year of Publication 27.04.2021
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Modular Recipe Controlled Calibration (MRCC) Apparatus Used to Balance Plasma in Multiple Station System
Bingham, Aaron, Hiester, Jacob L, Knight, Brian, Leeser, Karl Frederick, Herzig, Brett, French, David, Kapoor, Sunil, Metz, David Alan, Juco, Eller Y
Year of Publication 05.03.2020
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Year of Publication 05.03.2020
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Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system
JUCO, ELLER Y, HIESTER, JACOB L, KAPOOR, SUNIL, METZ, DAVID ALAN, FRENCH, DAVID, KNIGHT, BRIAN, HERZIG, BRETT, LEESER, KARL FREDERICK, BINGHAM, AARON
Year of Publication 01.11.2020
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Year of Publication 01.11.2020
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