TEMPERATURE CONTROL IN PLASMA PROCESSING APPARATUS USING PULSED HEAT TRANSFER FLUID FLOW
MERRY WALTER R, ZHOU XIAOPING, MAHADESWARASWAMY CHETAN, SILVEIRA FERNANDO M, MAYS BRAD L, PATTAR YASHASWINI B, TSONG TINA, NEVIL SHANE C, TAVASSOLI HAMID, BUCHBERGER DOUGLAS A, NGUYEN DUY D
Year of Publication 24.07.2013
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Year of Publication 24.07.2013
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METHOD AND APPARATUS FOR REMOVING POLYMER FROM THE WAFER BACKSIDE AND EDGE
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Year of Publication 06.10.2010
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Year of Publication 06.10.2010
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Feedforward temperature control for plasma processing apparatus
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Year of Publication 01.12.2020
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Year of Publication 01.12.2020
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AUTOMATED ALGORITHM FOR TUNING OF FEEDFORWARD CONTROL PARAMETERS IN PLASMA PROCESSING SYSTEM
MERRY WALTER R, PHI JUSTIN, SHOJI SERGIO FUKUDA, YANG YANG, NGUYEN DUY D
Year of Publication 14.08.2014
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Year of Publication 14.08.2014
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FEEDFORWARD TEMPERATURE CONTROL FOR PLASMA PROCESSING APPARATUS
MERRY WALTER R, MAHADESWARASWAMY CHETAN, MAYS BRAD L, SHOJI SERGIO FUKUDA, TSONG TINA, NEVIL SHANE C, BUCHBERGER, JR. DOUGLAS A, RAMASWAMY KARTIK, PATTAR YASHASWINI, NGUYEN DUY D, ZHANG CHUNLEI, SILVEIRA FERNANDO M, NOORBAKHSH HAMID
Year of Publication 02.06.2016
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Year of Publication 02.06.2016
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Feedforward temperature control for plasma processing apparatus
MERRY WALTER R, MAHADESWARASWAMY CHETAN, MAYS BRAD L, SHOJI SERGIO FUKUDA, TSONG TINA, NEVIL SHANE C, BUCHBERGER, JR. DOUGLAS A, RAMASWAMY KARTIK, NGUYEN DUY D, ZHANG CHUNLEI, PATTAR YASHASWINI B, SILVEIRA FERNANDO M, NOORBAKHSH HAMID
Year of Publication 10.05.2016
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Year of Publication 10.05.2016
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Efficient and accurate method for real-time prediction of the self-bias voltage of a wafer and feedback control of ESC voltage in plasma processing chamber
Chen, Zhigang, Rauf, Shahid, Merry, Walter R, Dorf, Leonid, Ramaswamy, Kartik, Collins, Kenneth S
Year of Publication 20.11.2012
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Year of Publication 20.11.2012
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Temperature control in plasma processing apparatus using pulsed heat transfer fluid flow
MERRY WALTER R, ZHOU XIAOPING, MAHADESWARASWAMY CHETAN, SILVEIRA FERNANDO M, MAYS BRAD L, PATTAR YASHASWINI B, TSONG TINA, NEVIL SHANE C, TAVASSOLI HAMID, BUCHBERGER DOUGLAS A, NGUYEN DUY D
Year of Publication 15.12.2015
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Year of Publication 15.12.2015
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TEMPERATURE CONTROL IN PLASMA PROCESSING APPARATUS USING PULSED HEAT TRANSFER FLUID FLOW
MERRY WALTER R, ZHOU XIAOPING, MAHADESWARASWAMY CHETAN, SILVEIRA FERNANDO M, MAYS BRAD L, PATTAR YASHASWINI B, TSONG TINA, NEVIL SHANE C, TAVASSOLI HAMID, BUCHBERGER DOUGLAS A, NGUYEN DUY D
Year of Publication 05.11.2015
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Year of Publication 05.11.2015
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Method and apparatus for removing polymer from the wafer backside and edge
MERRY WALTER R, BALAKRISHNA AJIT, SHEYNER ANCHEL, YOUSIF IMAD, SALINAS MARTIN JEFFREY, FUNG NANCY, RUI YING, RAUF SHAHID
Year of Publication 11.12.2012
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Year of Publication 11.12.2012
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Method and apparatus for removing polymer from the wafer backside and edge
Yousif, Imad, Sheyner, Anchel, Balakrishna, Ajit, Fung, Nancy, Rui, Ying, Salinas, Martin Jeffrey, Merry, Walter R, Rauf, Shahid
Year of Publication 11.12.2012
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Year of Publication 11.12.2012
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Temperature control in plasma processing apparatus using pulsed heat transfer fluid flow
MERRY WALTER R, ZHOU XIAOPING, MAHADESWARASWAMY CHETAN, SILVEIRA FERNANDO M, MAYS BRAD L, PATTAR YASHASWINI B, TSONG TINA, NEVIL SHANE C, TAVASSOLI HAMID, BUCHBERGER DOUGLAS A, NGUYEN DUY D
Year of Publication 23.12.2014
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Year of Publication 23.12.2014
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