Deposition and etch processes: continuum film evolution in microelectronics
Cale, T.S., Rogers, B.R., Merchant, T.P., Borucki, L.J.
Published in Computational materials science (01.11.1998)
Published in Computational materials science (01.11.1998)
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A multiscale simulator for low pressure chemical vapor deposition
GOBBERT, M. K, MERCHANT, T. P, BORUCKI, L. J, CALE, T. S
Published in Journal of the Electrochemical Society (01.11.1997)
Published in Journal of the Electrochemical Society (01.11.1997)
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A systematic approach to simulating rapid thermal processing systems
MERCHANT, T. P, COLE, J. V, KNUTSON, K. L, HEBB, J. P, JENSEN, K. F
Published in Journal of the Electrochemical Society (01.06.1996)
Published in Journal of the Electrochemical Society (01.06.1996)
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Multiple scale integrated modeling of deposition processes
Merchant, Tushar P, Gobbert, Matthias K, Cale, Timothy S, Borucki, Leonard J
Published in Thin solid films (17.04.2000)
Published in Thin solid films (17.04.2000)
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Journal Article
Topography simulation for the virtual wafer fab
Cale, Timothy S., Merchant, Tushar P., Borucki, Leonard J., Labun, Andrew H.
Published in Thin solid films (17.04.2000)
Published in Thin solid films (17.04.2000)
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Journal Article