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VERFAHREN ZUR GLOBALEN PLANARISIERUNG VON OBERFLÄCHEN FÜR INTEGRIERTE HALBLEITERSCHALTUNGEN
by
HUBER, RONALD.NAT
,
GREWAL, VIRINDER
,
MENZ
,
KLAUS
-
DIETER
Year of Publication
15.12.1994
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Method for the global planarisation of surfaces for integrated semiconductor circuits
by
HUBER, RONALD.NAT
,
GREWAL, VIRINDER
,
MENZ
,
KLAUS
-
DIETER
Year of Publication
14.12.1994
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Patent
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PROCESS FOR GLOBAL PLANARIZING OF SURFACES FOR INTEGRATED SEMICONDUCTOR CIRCUITS
by
GREWAL; VIRINDER-SINGH
,
HUBER; RONALD
,
MENZ
;
KLAUS
-
DIETER
Year of Publication
18.05.1993
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Method for the global planarisation of surfaces for integrated semiconductor circuits
by
HUBER, RONALD.NAT
,
GREWAL, VIRINDER
,
MENZ
,
KLAUS
-
DIETER
Year of Publication
13.03.1991
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Patent
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basic electric elements
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electric solid state devices not otherwise provided for
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esp@cenet
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