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Year of Publication 11.04.2023
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Year of Publication 27.05.2021
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Year of Publication 27.05.2021
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A fluid handling structure and a lithographic apparatus
ROPS CORNELIUS MARIA, OLIESLAGERS RUUD, SPRUYTENBURG PATRICK JOHANNES WILHELMUS, MELMAN JOHANNES CORNELIS PAULUS, GATTOBIGIO GIOVANNI LUCA, LEMPENS HAN HENRICUS ALDEGONDA, POLET THEODORUS WILHELMUS, EUMMELEN ERIK HENRICUS EGIDIUS CATHARINA, YU MIAO, ULUCAN ARTUNC
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Year of Publication 10.09.2020
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Year of Publication 26.07.2019
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Year of Publication 11.09.2018
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Fluid handling structure and lithographic apparatus
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Year of Publication 28.03.2023
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Year of Publication 29.09.2022
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Year of Publication 28.06.2022
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