3D-NAND CDSEM 계측을 위한 방법, 시스템, 및 컴퓨터 프로그램 제품
MEIR ROI, DUVDEVANI BAR SHARON, LEVIN SAHAR, LEVI SHIMON, MIROKU HIROSHI, YOSHIZAWA TAKU, KLEBANOV GRIGORY, SAHA KASTURI, SCHWARZBAND ISHAI, NOIFELD EFRAT, KRIS ROMAN, VERESCHAGIN VADIM
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Year of Publication 14.07.2021
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Budgeting and predicting pattern defects using edge placement error and machine learning
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Published in 2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) (07.03.2023)
Published in 2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) (07.03.2023)
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Method, system and computer program product for 3D-NAND CDSEM metrology
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Year of Publication 16.05.2023
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Year of Publication 16.05.2023
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METHOD, SYSTEM AND COMPUTER PROGRAM PRODUCT FOR 3D-NAND CDSEM METROLOGY
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Year of Publication 09.12.2021
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Year of Publication 09.12.2021
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METHOD, SYSTEM AND COMPUTER PROGRAM PRODUCT FOR 3D-NAND CDSEM METROLOGY
DUVDEVANI-BAR, Sharon, YOSHIZAWA, Taku, SAHA, Kasturi, NOIFELD, Efrat, VERESCHAGIN, Vadim, KLEBANOV, Grigory, MIROKU, Hiroshi, SCHWARZBAND, Ishai, KRIS, Roman, MEIR, Roi, LEVIN, Sahar, LEVI, Shimon
Year of Publication 07.05.2020
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Year of Publication 07.05.2020
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METHOD, SYSTEM AND COMPUTER MEDIUM FOR PROCESS CONTROL OF SEMICONDUCTOR STRUCTURE INCLUDING STAIRCASE
LEVIN, SAHAR, NOIFELD, EFRAT, MIROKU, HIROSHI, VERESCHAGIN, VADIM, LEVI, SHIMON, KRIS, ROMAN, SAHA, KASTURI, DUVDEVANI-BAR, SHARON, SCHWARZBAND, ISHAI, YOSHIZAWA, TAKU, MEIR, ROI, KLEBANOV, GRIGORY
Year of Publication 21.05.2023
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Year of Publication 21.05.2023
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METHOD, SYSTEM AND COMPUTER PROGRAM PRODUCT FOR 3D-NAND CDSEM METROLOGY
MEIR ROI, LEVIN SAHAR, LEVI SHIMON, MIROKU HIROSHI, YOSHIZAWA TAKU, KLEBANOV GRIGORY, SAHA KASTURI, SCHWARZBAND ISHAI, NOIFELD EFRAT, DUVDEVANI-BAR SHARON, KRIS ROMAN, VERESCHAGIN VADIM
Year of Publication 09.03.2021
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Year of Publication 09.03.2021
Patent
Method, system and computer program product for 3D-NAND CDSEM metrology
LEVIN, SAHAR, NOIFELD, EFRAT, MIROKU, HIROSHI, VERESCHAGIN, VADIM, LEVI, SHIMON, KRIS, ROMAN, SAHA, KASTURI, DUVDEVANI-BAR, SHARON, SCHWARZBAND, ISHAI, YOSHIZAWA, TAKU, MEIR, ROI, KLEBANOV, GRIGORY
Year of Publication 01.10.2020
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Year of Publication 01.10.2020
Patent