Search Results - "MEIJER, JAN ANDRIES" :: K.UTB vyhledávací portál

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DEVICE FOR SPOT SIZE MEASUREMENT AT WAFER LEVEL USING A KNIFE EDGE AND A METHOD FOR MANUFACTURING SUCH A DEVICE

by SCHEFFERS PAUL IJMERT, MEIJER JAN ANDRIES, SARR ABDOU
Year of Publication 29.10.2014

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CHARGED PARTICLE LITHOGRAPHY SYSTEM WITH ALIGNMENT SENSOR AND BEAM MEASUREMENT SENSOR

by SLOT ERWIN, SCHEFFERS PAUL IJMERT, KUIPER VINCENT SYLVESTER, MEIJER JAN ANDRIES, VERGEER NIELS
Year of Publication 04.12.2014

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METHOD FOR DETERMINING A DISTANCE BETWEEN TWO BEAMLETS IN A MULTI-BEAMLET EXPOSURE APPARATUS

by DE MEIJER, Jan, Andries
Year of Publication 12.06.2024

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METHOD FOR DETERMINING A DISTANCE BETWEEN TWO BEAMLETS IN A MULTI-BEAMLET EXPOSURE APPARATUS

by MEIJER, Jan Andries
Year of Publication 01.04.2020

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Charged particle lithography system with alignment sensor and beam measurement sensor

by Vergeer, Niels, Scheffers, Paul IJmert, Slot, Erwin, Meijer, Jan Andries, Kuiper, Vincent Sylvester
Year of Publication 21.11.2023

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METHOD FOR DETERMINING A DISTANCE BETWEEN TWO BEAMLETS IN A MULTI-BEAMLET EXPOSURE APPARATUS

by DE MEIJER, Jan, Andries
Year of Publication 22.04.2020

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Method for determining a distance between two beamlets in a multi-beamlet exposure apparatus

by MEIJER JAN ANDRIES
Year of Publication 12.05.2015

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METHOD FOR DETERMINING A DISTANCE BETWEEN TWO BEAMLETS IN A MULTI-BEAMLET EXPOSURE APPARATUS

by MEIJER, JAN ANDRIES
Year of Publication 18.09.2013

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METHOD FOR DETERMINING A DISTANCE BETWEEN TWO BEAMLETS IN A MULTI-BEAMLET EXPOSURE APPARATUS

by MEIJER JAN ANDRIES
Year of Publication 22.11.2012

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METHOD FOR DETERMINING A DISTANCE BETWEEN TWO BEAMLETS IN A MULTI-BEAMLET EXPOSURE APPARATUS

by MEIJER, JAN ANDRIES
Year of Publication 18.05.2012

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DEVICE FOR SIMULTANEOUS SPOT SIZE MEASUREMENT OF A PLURALITY OF BEAMS AT WAFER LEVEL USING A PLURALITY OF KNIFE EDGES AND A METHOD FOR MANUFACTURING SUCH A DEVICE

by SARR, Abdourahmane Ange, SCHEFFERS, Paul IJmert, MEIJER, Jan Andries
Year of Publication 08.03.2017

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Multi-beamlet exposure apparatuses,methods and sensors for determining a distance between two beamlets therein

by MEIJER, JAN ANDRIES
Year of Publication 11.08.2016

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Device for spot size measurement at wafer level using a Knife Edge and a method for manufacturing such a device

by PAUL IJMERT SCHEFFERS, JAN ANDRIES MEIJER, ABDOURAHMANE ANGE SARR
Year of Publication 22.07.2016

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Device for spot size measurement at wafer level using a knife edge and a method for manufacturing such a device

by SARR ABDOURAHMANE ANGE, SCHEFFERS PAUL IJMERT, MEIJER JAN ANDRIES
Year of Publication 19.01.2016

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CHARGED PARTICLE LITHOGRAPHY SYSTEM WITH SENSOR ASSEMBLY

by SCHEFFERS PAUL IJMERT, MEIJER JAN ANDRIES, DAUDEY CAREL FERDINAND
Year of Publication 25.06.2015

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Charged particle lithography system with alignment sensor and beam measurement sensor

by Slot Erwin, Kuiper Vincent Sylvester, Vergeer Niels, Scheffers Paul Ijmert, Meijer Jan Andries
Year of Publication 30.05.2017

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DEVICE FOR SPOT SIZE MEASUREMENT AT WAFER LEVEL USING A KNIFE EDGE AND A METHOD FOR MANUFACTURING SUCH A DEVICE

by SCHEFFERS PAUL IJMERT, MEIJER JAN ANDRIES, SARR ABDOU
Year of Publication 01.01.2015

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DEVICE FOR SIMULTANEOUS SPOT SIZE MEASUREMENT OF A PLURALITY OF BEAMS AT WAFER LEVEL USING A PLURALITY OF KNIFE EDGES AND A METHOD FOR MANUFACTURING SUCH A DEVICE

by SARR, Abdourahmane Ange, SCHEFFERS, Paul IJmert, MEIJER, Jan Andries
Year of Publication 03.12.2014

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DEVICE FOR SPOT SIZE MEASUREMENT AT WAFER LEVEL USING A KNIFE EDGE AND A METHOD FOR MANUFACTURING SUCH A DEVICE

by SCHEFFERS PAUL IJMERT, MEIJER JAN ANDRIES, SARR ABDOU
Year of Publication 02.12.2014

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DEVICE FOR SPOT SIZE MEASUREMENT AT WAFER LEVEL USING A KNIFE EDGE AND A METHOD FOR MANUFACTURING SUCH A DEVICE

by SCHEFFERS PAUL IJMERT, MEIJER JAN ANDRIES, SARR ABDOU
Year of Publication 08.09.2014

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