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Self aligned top extension formation for vertical transistors
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Phase change memory cell with a wrap around and ring type of electrode contact and a projection liner
Simon, Andrew Herbert, Brew, Kevin W, Ok, Injo, Saraf, Iqbal Rashid, Sankarapandian, Muthumanickam, Saulnier, Nicole, Bao, Ruqiang, Mehta, Sanjay C
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Year of Publication 27.09.2022
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