PROTECTION OF HIGH-K DIELECTRIC DURING RELIABILITY ANNEAL ON NANOSHEET STRUCTURES
Sankarapandian Muthumanickam, Narayanan Vijay, Loubet Nicolas J, Mehta Sanjay C
Year of Publication 09.11.2017
Get full text
Year of Publication 09.11.2017
Patent
Bottom spacer formation for vertical transistor
Reznicek Alexander, Gluschenkov Oleg, Mehta Sanjay C, Mochizuki Shogo
Year of Publication 26.09.2017
Get full text
Year of Publication 26.09.2017
Patent
Vertical transistor bottom spacer formation
Reznicek Alexander, Gluschenkov Oleg, Mehta Sanjay C, Mochizuki Shogo
Year of Publication 29.08.2017
Get full text
Year of Publication 29.08.2017
Patent
Self aligned top extension formation for vertical transistors
Reznicek Alexander, Gluschenkov Oleg, Mehta Sanjay C, Mochizuki Shogo
Year of Publication 29.08.2017
Get full text
Year of Publication 29.08.2017
Patent
Spacer formation on semiconductor device
Devarajan, Thamarai Selvi, Seo, Soon-Cheon, Mehta, Sanjay C, Miller, Eric R
Year of Publication 16.07.2019
Get full text
Year of Publication 16.07.2019
Patent
Solid state diffusion doping for bulk finFET devices
Anderson Brent A, Mehta Sanjay C, Pranatharthiharan Balasubramanian, Jagannathan Hemanth
Year of Publication 28.02.2017
Get full text
Year of Publication 28.02.2017
Patent
Pulmonary Pathology of COVID-19 Following 8 Weeks to 4 Months of Severe Disease: A Report of Three Cases, Including One With Bilateral Lung Transplantation
Aesif, Scott W, Bribriesco, Alejandro C, Yadav, Ruchi, Nugent, Summer L, Zubkus, Dmitriy, Tan, Carmela D, Atul C Mehta Sanjay Mukhopadhyay
Published in American Journal of Clinical Pathology (14.12.2020)
Get full text
Published in American Journal of Clinical Pathology (14.12.2020)
Web Resource
UV Cure Enabled Robust STI Oxide Gap Fill Solution for Thermally Limited Flow in Advanced Logic Devices
Mehta, Sanjay C, Conti, Richard, Devarajan, Thamarai, Wright, Matthew P, Yao, Yiping, Cohen, Stephan A, Ryan, Todd, Haigh, Thomas J, Hall, Paul, Canaperi, Donald F, Tai, Leo
Published in Meeting abstracts (Electrochemical Society) (01.09.2016)
Published in Meeting abstracts (Electrochemical Society) (01.09.2016)
Get full text
Journal Article