A SiC MEMS Resonant Strain Sensor for Harsh Environment Applications
Azevedo, R.G., Jones, D.G., Jog, A.V., Jamshidi, B., Myers, D.R., Li Chen, Xiao-an Fu, Mehregany, M., Wijesundara, M.B.J., Pisano, A.P.
Published in IEEE sensors journal (01.04.2007)
Published in IEEE sensors journal (01.04.2007)
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Journal Article
Extreme temperature 6H-SiC JFET integrated circuit technology
Neudeck, Philip G., Garverick, Steven L., Spry, David J., Chen, Liang-Yu, Beheim, Glenn M., Krasowski, Michael J., Mehregany, Mehran
Published in Physica status solidi. A, Applications and materials science (01.10.2009)
Published in Physica status solidi. A, Applications and materials science (01.10.2009)
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Journal Article
550 ^\hbox Integrated Logic Circuits using 6H-SiC JFETs
Chia-Wei Soong, Patil, A. C., Garverick, S. L., Xiaoan Fu, Mehregany, M.
Published in IEEE electron device letters (01.10.2012)
Published in IEEE electron device letters (01.10.2012)
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Journal Article
Low Stress Polycrystalline SiC Thin Films Suitable for MEMS Applications
Fu, Xiao-An, Dunning, Jeremy L., Mehregany, Mehran, Zorman, Christian A.
Published in Journal of the Electrochemical Society (01.01.2011)
Published in Journal of the Electrochemical Society (01.01.2011)
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Journal Article
Characterization of frequency tuning using focused ion beam platinum deposition
Enderling, Stefan, Hedley, John, Jiang, Liudi, Cheung, Rebecca, Zorman, Christian, Mehregany, Mehran, Walton, Anthony J
Published in Journal of micromechanics and microengineering (01.02.2007)
Published in Journal of micromechanics and microengineering (01.02.2007)
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Journal Article
Fully-monolithic, 600°C differential amplifiers in 6H-SiC JFET IC technology
Patil, A.C., Xiao-an Fu, Mehregany, M., Garverick, S.L.
Published in 2009 IEEE Custom Integrated Circuits Conference (01.09.2009)
Published in 2009 IEEE Custom Integrated Circuits Conference (01.09.2009)
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Conference Proceeding
Electromechanical computing at 500 degrees C with silicon carbide
Lee, Te-Hao, Bhunia, Swarup, Mehregany, Mehran
Published in Science (American Association for the Advancement of Science) (10.09.2010)
Published in Science (American Association for the Advancement of Science) (10.09.2010)
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Journal Article
Electromechanical Computing at 500°C with Silicon Carbide
Lee, Te-Hao, Bhunia, Swarup, Mehregany, Mehran
Published in Science (American Association for the Advancement of Science) (10.09.2010)
Published in Science (American Association for the Advancement of Science) (10.09.2010)
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Journal Article
Micro-opto-mechanical devices fabricated by anisotropic etching of (110) silicon
Uenishi, Y, Tsugai, M, Mehregany, M
Published in Journal of micromechanics and microengineering (01.12.1995)
Published in Journal of micromechanics and microengineering (01.12.1995)
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Journal Article
Embedded two-phase cooling of high heat flux electronics on silicon carbide (SiC) using thin-film evaporation and an enhanced delivery system (FEEDS) manifold-microchannel cooler
Bae, Daniel G., Mandel, Raphael K., Dessiatoun, Serguei V., Rajgopal, Srihari, Roberts, Samantha P., Mehregany, Mehran, Ohadi, Michael M.
Published in 2017 16th IEEE Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (ITherm) (01.05.2017)
Published in 2017 16th IEEE Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (ITherm) (01.05.2017)
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Conference Proceeding