Sidewall image transfer process with multiple critical dimensions
RYAN O JUNG, SIVANANDA KANAKASABAPATHY, SEAN D BURNS, ALLEN H GABOR, SUDHARSHANAN RAGHUNATHAN, ERIN CATHERINE MCLELLAN
Year of Publication 09.12.2015
Get full text
Year of Publication 09.12.2015
Patent
Sidewall image transfer process with multiple critical dimensions
RYAN O JUNG, SIVANANDA KANAKASABAPATHY, SEAN D BURNS, ALLEN H GABOR, SUDHARSHANAN RAGHUNATHAN, ERIN CATHERINE MCLELLAN
Year of Publication 11.06.2014
Get full text
Year of Publication 11.06.2014
Patent
Sidewall image transfer process with multiple critical dimensions
BURNS SEAN D, GABOR ALLEN H, KANAKASABAPATHY SIVANANDA, MCLELLAN ERIN CATHERINE, RAGHUNATHAN SUDHARSHANAN, JUNG RYAN O
Year of Publication 18.03.2014
Get full text
Year of Publication 18.03.2014
Patent
SIDEWALL IMAGE TRANSFER PROCESS WITH MULTIPLE CRITICAL DIMENSIONS
BURNS SEAN D, GABOR ALLEN H, KANAKASABAPATHY SIVANANDA, MCLELLAN ERIN CATHERINE, RAGHUNATHAN SUDHARSHANAN, JUNG RYAN O
Year of Publication 11.04.2013
Get full text
Year of Publication 11.04.2013
Patent
SIDEWALL IMAGE TRANSFER PROCESS WITH MULTIPLE CRITICAL DIMENSIONS
BURNS, SEAN, D, JUNG, RYAN, O, MCLELLAN, ERIN, CATHERINE, KANAKASABAPATHY, SIVANANDA, RAGHUNATHAN, SUDHARSHANAN, GABOR, ALLEN, H
Year of Publication 11.04.2013
Get full text
Year of Publication 11.04.2013
Patent
Sidewall image transfer process with multiple critical dimensions
BURNS SEAN D, GABOR ALLEN H, KANAKASABAPATHY SIVANANDA, MCLELLAN ERIN CATHERINE, RAGHUNATHAN SUDHARSHANAN, JUNG RYAN O
Year of Publication 04.06.2014
Get full text
Year of Publication 04.06.2014
Patent