Maintaining abatement efficiency while increasing utility efficiency using the applied iSYS™ controller
McIntosh, Monique
Published in ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference (01.05.2013)
Published in ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference (01.05.2013)
Get full text
Conference Proceeding
NITROGEN OXIDE ABATEMENT IN SEMICONDUCTOR FABRICATION
MCINTOSH MONIQUE, FISHER PAUL E, DICKINSON COLIN JOHN, HERBERT ANDREW
Year of Publication 12.09.2016
Get full text
Year of Publication 12.09.2016
Patent
PLASMA ABATEMENT OF COMPOUNDS CONTAINING HEAVY ATOMS
COX MICHAEL S, MCINTOSH MONIQUE, FISHER PAUL E, TANAKA YUTAKA, DICKINSON COLIN JOHN, YUAN ZHENG
Year of Publication 09.07.2018
Get full text
Year of Publication 09.07.2018
Patent
PLASMA ABATEMENT OF COMPOUNDS CONTAINING HEAVY ATOMS
COX MICHAEL S, MCINTOSH MONIQUE, FISHER PAUL E, TANAKA YUTAKA, DICKINSON COLIN JOHN, YUAN ZHENG
Year of Publication 09.11.2016
Get full text
Year of Publication 09.11.2016
Patent
Plasma abatement of compounds containing heavy atoms
Cox, Michael S, McIntosh, Monique, Tanaka, Yutaka, Fisher, Paul E, Dickinson, Colin John, Yuan, Zheng
Year of Publication 30.11.2021
Get full text
Year of Publication 30.11.2021
Patent
Plasma abatement of compounds containing heavy atoms
Cox, Michael S, McIntosh, Monique, Tanaka, Yutaka, Fisher, Paul E, Dickinson, Colin John, Yuan, Zheng
Year of Publication 22.10.2019
Get full text
Year of Publication 22.10.2019
Patent
PLASMA ABATEMENT OF COMPOUNDS CONTAINING HEAVY ATOMS
DICKINSON, Colin John, FISHER, Paul E, MCINTOSH, Monique, COX, Michael S, YUAN, Zheng, TANAKA, Yutaka
Year of Publication 24.01.2019
Get full text
Year of Publication 24.01.2019
Patent
PLASMA ABATEMENT OF COMPOUNDS CONTAINING HEAVY ATOMS
DICKINSON, Colin John, FISHER, Paul E, MCINTOSH, Monique, COX, Michael S, YUAN, Zheng, TANAKA, Yutaka
Year of Publication 08.11.2018
Get full text
Year of Publication 08.11.2018
Patent
NITROGEN OXIDE ABATEMENT IN SEMICONDUCTOR FABRICATION
Dickinson Colin John, Fisher Paul E, Herbert Andrew, McIntosh Monique
Year of Publication 22.09.2016
Get full text
Year of Publication 22.09.2016
Patent
PLASMA ABATEMENT OF COMPOUNDS CONTAINING HEAVY ATOMS
FISHER Paul E, YUAN Zheng, DICKINSON Colin John, TANAKA Yutaka, COX Michael S, MCINTOSH Monique
Year of Publication 03.08.2017
Get full text
Year of Publication 03.08.2017
Patent
NITROGEN OXIDE ABATEMENT IN SEMICONDUCTOR FABRICATION
MCINTOSH, MONIQUE, DICKINSON, COLIN JOHN, HERBERT, ANDREW, FISHER, PAUL E
Year of Publication 23.07.2015
Get full text
Year of Publication 23.07.2015
Patent
Plasma abatement of compounds containing heavy atoms
Cox Michael S, Dickinson Colin John, Tanaka Yutaka, Fisher Paul E, Yuan Zheng, McIntosh Monique
Year of Publication 16.05.2017
Get full text
Year of Publication 16.05.2017
Patent
PLASMA ABATEMENT OF COMPOUNDS CONTAINING HEAVY ATOMS
MCINTOSH, MONIQUE, COX, MICHAEL S, TANAKA, YUTAKA, DICKINSON, COLIN JOHN, YUAN, ZHENG, FISHER, PAUL E
Year of Publication 11.09.2015
Get full text
Year of Publication 11.09.2015
Patent
PLASMA ABATEMENT OF COMPOUNDS CONTAINING HEAVY ATOMS
COX MICHAEL S, MCINTOSH MONIQUE, FISHER PAUL E, TANAKA YUTAKA, DICKINSON COLIN JOHN, YUAN ZHENG
Year of Publication 10.09.2015
Get full text
Year of Publication 10.09.2015
Patent
Plasma abatement of compounds containing heavy atoms
MCINTOSH, MONIQUE, COX, MICHAEL S, TANAKA, YUTAKA, DICKINSON, COLIN JOHN, YUAN, ZHENG, FISHER, PAUL E
Year of Publication 11.08.2018
Get full text
Year of Publication 11.08.2018
Patent