Multi Trigger Resist for EUV Lithography
Popescu, Carmen, Vesters, Yannick, McClelland, Alexandra, Simone, Danilo De, Dawson, Guy, Roth, John, Theis, Wolfgang, Vandenberghe, Geert, Robinson, Alex P.G.
Published in Journal of Photopolymer Science and Technology (25.06.2018)
Published in Journal of Photopolymer Science and Technology (25.06.2018)
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Journal Article
Novel Molecular Resist for EUV and Electron Beam Lithography
Frommhold, Andreas, Yang, Dongxu, McClelland, Alexandra, Roth, John, Xue, Xiang, Rosamund, Mark C., Linfield, Edmund H., Robinson, Alex P. G.
Published in Journal of Photopolymer Science and Technology (01.01.2015)
Published in Journal of Photopolymer Science and Technology (01.01.2015)
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Journal Article
EUV용 패턴 레지스트 형성 방법
LADA TOM, FROMMHOLD ANDREAS, JACKSON EDWARD, MCCLELLAND ALEXANDRA, ROTH JOHN, ROBINSON ALEX PHILLIP GRAHAM, O'CALLAHAN GREG, POPESCU CARMEN
Year of Publication 17.06.2022
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Year of Publication 17.06.2022
Patent
다중 트리거 모노머 함유 포토레지스트 조성물 및 방법
FROMMHOLD ANDREAS, MCCLELLAND ALEXANDRA, URE DAVID, ROBINSON ALEX PHILLIP GRAHAM, YANG DONGXU, ROTH JOHN L
Year of Publication 28.04.2020
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Year of Publication 28.04.2020
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다중 촉발 포토레지스트 조성물 및 방법
FROMMHOLD ANDREAS, MCCLELLAND ALEXANDRA, ROBINSON ALEX PHILLIP GRAHAM, YANG DONGXU, ROTH JOHN L
Year of Publication 25.03.2020
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Year of Publication 25.03.2020
Patent
감도 강화 포토레지스트
FROMMHOLD ANDREAS, LADA THOMAS, MCCLELLAND ALEXANDRA, ROTH JOHN, ROBINSON ALEX PHILLIP GRAHAM
Year of Publication 24.05.2018
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Year of Publication 24.05.2018
Patent
METHANOFULLERENES
XUE XIANG, PALMER RICHARD EDWARD, ATHENS DREW, FROMMHOLD ANDREAS, MCCLELLAND ALEXANDRA, ROBINSON ALEX PHILIP GRAHAM, PREECE JON ANDREW, YANG DONGXU
Year of Publication 13.01.2016
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Year of Publication 13.01.2016
Patent
METHANOFULLERENES
XUE XIANG, PALMER RICHARD EDWARD, ATHENS DREW, FROMMHOLD ANDREAS, MCCLELLAND ALEXANDRA, ROBINSON ALEX PHILIP GRAHAM, PREECE JON ANDREW, YANG DONGXU
Year of Publication 15.07.2015
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Year of Publication 15.07.2015
Patent
ENHANCED EUV MATERIALS, PHOTORESISTS AND METHODS OF THEIR USE
JACKSON, Ed, ROBINSON, Alex, LADA, Tom, MCCLELLAND, Alexandra, POPESCU, Carmen, O'CALLAGHAN, Gregory, ROTH, John
Year of Publication 11.01.2024
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Year of Publication 11.01.2024
Patent
ENHANCED EUV PHOTORESISTS AND METHODS OF THEIR USE
NGUYEN, Van, ROBINSON, Alex, JACKSON, Edward, MCCLELLAND, Alexandra, O'CALLAGHAN, Gregory, MELONI, Fernanda
Year of Publication 30.11.2023
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Year of Publication 30.11.2023
Patent
ENHANCED EUV PHOTORESISTS AND METHODS OF THEIR USE
ROBINSON, Alex, LADA, Tom, JACKSON, Edward, MCCLELLAND, Alexandra, NGUYEN, Van Huy, MCCOY, Tim, O'CALLAGHAN, Gregory, MELONI, Fernanda, ROTH, John
Year of Publication 30.11.2023
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Year of Publication 30.11.2023
Patent
Multiple trigger monomer containing photoresist compositions and method
McClelland, Alexandra, Ure, David, Robinson, Alex Philip Graham, Frommhold, Andreas, Roth, John, Yang, Dongxu
Year of Publication 18.10.2022
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Year of Publication 18.10.2022
Patent
Enhanced EUV photoresist materials, formulations and processes
McClelland, Alexandra, Lada, Tom, Robinson, Alex P. G, Frommhold, Andreas, Jackson, Edward, Roth, John, O'Callahan, Greg, Popescu, Carmen
Year of Publication 20.06.2023
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Year of Publication 20.06.2023
Patent
MULTIPLE TRIGGER PHOTORESIST COMPOSITIONS AND METHOD
FROMMHOLD, Andeas, ROBINSON, Alex, YANG, Dongxu, MCCLELLAND, Alexandra, ROTH, John
Year of Publication 30.08.2018
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Year of Publication 30.08.2018
Patent
Enhanced EUV Photoresist Materials, Formulations and Processes
McClelland, Alexandra, Lada, Tom, Robinson, Alex P. G, Frommhold, Andreas, Jackson, Edward, Roth, John, O'Callahan, Greg, Popescu, Carmen
Year of Publication 27.08.2020
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Year of Publication 27.08.2020
Patent
MULTIPLE TRIGGER MONOMER CONTAINING PHOTORESIST COMPOSITIONS AND METHOD
McClelland, Alexandra, Ure, David, Robinson, Alex Philip Graham, Frommhold, Andreas, Roth, John, Yang, Dongxu
Year of Publication 09.05.2019
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Year of Publication 09.05.2019
Patent
MULTIPLE TRIGGER MONOMER CONTAINING PHOTORESIST COMPOSITIONS AND METHOD
FROMMHOLD, Andreas, URE, David, ROBINSON, Alex, YANG, Dongxu, MCCLELLAND, Alexandra, ROTH, John
Year of Publication 07.03.2019
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Year of Publication 07.03.2019
Patent
Multiple trigger monomer containing photoresist compositions and method
YANG, DONGXU, ROTH, JOHN, URE, DAVID, ROBINSON, ALEX PHILLIP GRAHAM, MCCLELLAND, ALEXANDRA, FROMMHOLD, ANDREAS
Year of Publication 11.11.2023
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Year of Publication 11.11.2023
Patent
Multiple trigger photoresist compositions and methods
McClelland, Alexandra, Robinson, Alex Phillip Graham, Frommhold, Andreas, Roth, John, Yang, Dongxu
Year of Publication 09.10.2018
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Year of Publication 09.10.2018
Patent
MULTIPLE TRIGGER PHOTORESIST COMPOSITIONS AND METHODS
McClelland, Alexandra, Robinson, Alex Phillip Graham, Frommhold, Andreas, Roth, John, Yang, Dongxu
Year of Publication 30.08.2018
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Year of Publication 30.08.2018
Patent