Low-Resistance Titanium Contacts and Thermally Unstable Nickel Germanide Contacts on p-Type Germanium
Hao Yu, Schaekers, Marc, Schram, Tom, Aderhold, Wolfgang, Mayur, Abhilash J., Mitard, Jerome, Witters, Liesbeth, Barla, Kathy, Collaert, Nadine, Horiguchi, Naoto, Voon-Yew Thean, Aaron, De Meyer, Kristin
Published in IEEE electron device letters (01.04.2016)
Published in IEEE electron device letters (01.04.2016)
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Journal Article
SYSTEM AND METHOD FOR RADICAL AND THERMAL PROCESSING OF SUBSTRATES
TAM NORMAN L, MAYUR ABHILASH J, SPULLER MATTHEW, ZHANG XINMING, SHARMA SHASHANK
Year of Publication 27.11.2023
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Year of Publication 27.11.2023
Patent
티탄 질화물 막들을 위한 처리 방법들
TAM NORMAN L, MAYUR ABHILASH J, SPULLER MATTHEW, ZHANG XINMING, SHARMA SHASHANK
Year of Publication 14.04.2023
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Year of Publication 14.04.2023
Patent
기판들의 라디칼 및 열 처리를 위한 시스템 및 방법
TAM NORMAN L, MAYUR ABHILASH J, SPULLER MATTHEW, ZHANG XINMING, SHARMA SHASHANK
Year of Publication 04.07.2022
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Year of Publication 04.07.2022
Patent
마이크로파 방사로 유전체 막들을 후처리하는 방법들
MAYUR ABHILASH J, SUN YONG, JHA PRAKET PRAKASH, ADERHOLD WOLFGANG R, LI DONGQING, SEAMONS MARTIN JAY, SHARMA SHASHANK, LIANG JINGMEI
Year of Publication 03.03.2022
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Year of Publication 03.03.2022
Patent
오버레이 에러 정정
ADAMS BRUCE E, MAYUR ABHILASH J, HOLLAR KELLY E, DAI HUIXIONG, BANGAR MANGESH, CHEN JAUJIUN
Year of Publication 18.05.2018
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Year of Publication 18.05.2018
Patent
MANAGING THERMAL BUDGET IN ANNEALING OF SUBSTRATES
HUNTER AARON, MAYUR ABHILASH J, RANISH JOSEPH, MOFFATT STEPHEN, RAMAMURTHY SUNDAR
Year of Publication 28.11.2017
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Year of Publication 28.11.2017
Patent
MILLISECOND ANNEALING DSA EDGE PROTECTION
KOELMEL BLAKE, MAYUR ABHILASH J, LARMAGNAC DAVID D. L, LERNER ALEXANDER N, YUDOVSKY JOSEPH, MCINTOSH ROBERT C
Year of Publication 26.06.2017
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Year of Publication 26.06.2017
Patent
MILLISECOND ANNEALING (DSA) EDGE PROTECTION
KOELMEL BLAKE, MAYUR ABHILASH J, LARMAGNAC DAVID D. L, LERNER ALEXANDER N, YUDOVSKY JOSEPH, MCINTOSH ROBERT C
Year of Publication 16.03.2016
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Year of Publication 16.03.2016
Patent
MANAGING THERMAL BUDGET IN ANNEALING OF SUBSTRATES
HUNTER AARON, MAYUR ABHILASH J, RANISH JOSEPH, MOFFATT STEPHEN, RAMAMURTHY SUNDAR
Year of Publication 20.05.2011
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Year of Publication 20.05.2011
Patent
ABSORBER LAYER FOR DYNAMIC SURFACE ANNEALING PROCESSING
MAYUR ABHILASH J, JENNINGS DEAN, BENCHER CHRIS D, BROUGH RICHARD A, AUTRYVE LUC VAN, LIANG HAIFAN, YAM MARK, YEH WENDY H
Year of Publication 18.04.2013
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Year of Publication 18.04.2013
Patent
MILLISECOND ANNEALING (DSA) EDGE PROTECTION
KOELMEL BLAKE, MAYUR ABHILASH J, LARMAGNAC DAVID D. L, LERNER ALEXANDER N, YUDOVSKY JOSEPH, MCINTOSH ROBERT C
Year of Publication 24.11.2010
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Year of Publication 24.11.2010
Patent
ABSORBER LAYER FOR DYNAMIC SURFACE ANNEALING PROCESSING
MAYUR ABHILASH J, JENNINGS DEAN, BENCHER CHRIS D, BROUGH RICHARD A, AUTRYVE LUC VAN, LIANG HAIFAN, YAM MARK, YEH WENDY H
Year of Publication 14.03.2012
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Year of Publication 14.03.2012
Patent
THERMAL FLUX PROCESSING BY SCANNING ELECTROMAGNETIC RADIATION
MAYUR ABHILASH J, GOLDIN ALEXANDER, JENNINGS DEAN C, BEHRENS VERNON, TERTITSKI LEONID M, YAM MARK, O'BRIEN PAUL A
Year of Publication 18.08.2010
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Year of Publication 18.08.2010
Patent
PYROMETER FOR LASER ANNEALING SYSTEM COMPATIBLE WITH AMORPHOUS CARBON OPTICAL ABSORBER LAYER
ADAMS BRUCE E, MAYUR ABHILASH J, RAMANUJAM RAJESH S, THOMAS TIMOTHY N, HUNTER AARON MUIR, LI JIPING
Year of Publication 30.04.2010
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Year of Publication 30.04.2010
Patent