Novel Zirconium Precursors for Atomic Layer Deposition of ZrO2 films
Chen, Tianniu, Cameron, Thomas M., Nguyen, Shawn D., Stauf, Gregory T., Peters, David W., Maylott, Leah, Li, Weimin, Xu, Chongying, Roeder, Jeffrey F., Hendrix, Bryan C., Hilgarth, Monica, Niinisto, Jaakko, Kukli, Kaupo, Ritala, Mikko, Leskela, Markku
Published in ECS transactions (2009)
Published in ECS transactions (2009)
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Antimony compounds useful for deposition of antimony-containing materials
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Year of Publication 19.05.2015
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ANTIMONY COMPOUNDS USEFUL FOR DEPOSITION OF ANTIMONY-CONTAINING MATERIALS
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Year of Publication 24.07.2014
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Year of Publication 24.07.2014
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Antimony compounds useful for deposition of antimony-containing materials
MAYLOTT LEAH, HUNKS WILLIAM, XU CHONGYING, CHEN PHILIP S. H, CHEN TIANNIU
Year of Publication 18.03.2014
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Year of Publication 18.03.2014
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ANTIMONY COMPOUNDS USEFUL FOR DEPOSITION OF ANTIMONY-CONTAINING MATERIALS
MAYLOTT LEAH, CHEN PHILIP S.H, HUNKS WILLIAM, XU CHONGYING, CHEN TIANNIU
Year of Publication 12.05.2011
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Year of Publication 12.05.2011
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ANTIMONY COMPOUNDS USEFUL FOR DEPOSITION OF ANTIMONY-CONTAINING MATERIALS
XU, CHONGYING, CHEN, PHILIP, S.H, CHEN, TIANNIU, MAYLOTT, LEAH, HUNKS, WILLIAM
Year of Publication 07.01.2010
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Year of Publication 07.01.2010
Patent
ANTIMONY COMPOUNDS USEFUL FOR DEPOSITION OF ANTIMONY-CONTAINING MATERIALS
XU, CHONGYING, CHEN, PHILIP, S.H, CHEN, TIANNIU, MAYLOTT, LEAH, HUNKS, WILLIAM
Year of Publication 05.11.2009
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Year of Publication 05.11.2009
Patent
Antimony compounds useful for deposition of antimony-containing materials
XU, CHONGYING, WILLIAM HUNKS, CHEN, TIANNIU, MAYLOTT, LEAH, CHEN, PHILIP S. H
Year of Publication 01.07.2015
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Year of Publication 01.07.2015
Patent
Novel Zirconium precursors for Atomic Layer Deposition of ZrO2 films
Chen, Tianniu, Cameron, Thomas M., Nguyen, Shawn D., Stauf, Gregory T., Peters, David W., Maylott, Leah, Li, Weimin, Xu, Chongying, Roeder, Jeffrey F., Hilgarth, Monica, Niinisto, Jaakko, Kukli, Kaupo, Ritala, Mikko, Leskela, Markku
Published in Meeting abstracts (Electrochemical Society) (29.08.2008)
Published in Meeting abstracts (Electrochemical Society) (29.08.2008)
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Journal Article
ZIRCONIUM, HAFNIUM, TITANIUM, AND SILICON PRECURSORS FOR ALD/CVD
MAYLOTT LEAH, ROEDER JEFFREY F, CAMERON THOMAS M, XU CHONGYING, BENAC BRIAN, STAUF GREGORY T, PETERS DAVID W, CHEN TIANNIU, HENDRIX BRYAN C
Year of Publication 06.05.2010
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Year of Publication 06.05.2010
Patent
ZIRCONIUM, HAFNUIM, TITANIUM, AND SILICON PRECURSORS FOR ALD/CVD
MAYLOTT LEAH, ROEDER JEFFREY F, CAMERON THOMAS M, XU CHONGYING, BENAC BRIAN, STAUF GREGORY T, PETERS DAVID W, CHEN TIANNIU, HENDRIX BRYAN C
Year of Publication 12.02.2010
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Year of Publication 12.02.2010
Patent
ZIRCONIUM, HAFNUIM, TITANIUM, AND SILICON PRECURSORS FOR ALD/CVD
XU, CHONGYING, STAUF, GREGORY, T, PETERS, DAVID, W, BENAC, BRIAN, HENDRIX, BRYAN, C, CHEN, TIANNIU, ROEDER, JEFFREY, F, MAYLOTT, LEAH, CAMERON, THOMAS, M
Year of Publication 08.01.2009
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Year of Publication 08.01.2009
Patent
ZIRCONIUM, HAFNUIM, TITANIUM, AND SILICON PRECURSORS FOR ALD/CVD
XU, CHONGYING, STAUF, GREGORY, T, PETERS, DAVID, W, BENAC, BRIAN, HENDRIX, BRYAN, C, CHEN, TIANNIU, ROEDER, JEFFREY, F, MAYLOTT, LEAH, CAMERON, THOMAS, M
Year of Publication 23.10.2008
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Year of Publication 23.10.2008
Patent
Antimony compounds useful for deposition of antimony-containing materials
CHEN, TIAN-NIU, XU, CHONGYING, MAYLOTT, LEAH, HUNKS, WILLIAM, CHEN, PHILIP S. H
Year of Publication 01.02.2010
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Year of Publication 01.02.2010
Patent
Zirconium, hafnium, titanium and silicon precursors for ALD/CVD
XU, CHONGYING, ROEDER, JEFFREY F, BENAC, BRIAN, HENDRIX, BRYAN C, CAMERON, THOMAS M, CHEN, TIANNIU, MAYLOTT, LEAH, PETERS, DAVID W, STAUF, GREGORY T
Year of Publication 16.02.2009
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Year of Publication 16.02.2009
Patent