SILICON IMPLANTATION IN SUBSTRATES AND PROVISION OF SILICON PRECURSOR COMPOSITIONS THEREFOR
MAYER JAMES J, YEDAVE SHARAD N, TANG YING, RAY RICHARD S, BYL OLEG, KAIM ROBERT, CHEN TIANNIU, SWEENEY JOSEPH D
Year of Publication 20.04.2016
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Year of Publication 20.04.2016
Patent
SILICON IMPLANTATION IN SUBSTRATES AND PROVISION OF SILICON PRECURSOR COMPOSITIONS THEREFOR
MAYER JAMES J, YEDAVE SHARAD N, TANG YING, RAY RICHARD S, BYL OLEG, KAIM ROBERT, CHEN TIANNIU, SWEENEY JOSEPH D
Year of Publication 21.07.2016
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Year of Publication 21.07.2016
Patent
Silicon implantation in substrates and provision of silicon precursor compositions therefor
YEDAVE, SHARAD N, TANG, YING, SWEENEY, JOSEPH D, MAYER, JAMES J, KAIM, ROBERT, BYL, OLEG, CHEN, TIANNIU, RAY, RICHARD S
Year of Publication 21.03.2019
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Year of Publication 21.03.2019
Patent