EUV Membrane for EUV lithography
PETER MARIA, NASALEVICH MAXIM ALEKSANDROVICH, VAN DE KERKHOF MARCUS ADRIANUS, BANERJEE NIRUPAM, ZDRAVKOV ALEXANDAR NIKOLOV, VERBURG ANTONIUS WILLEM, BLAUW MICHIEL ALEXANDER, BROUNS DERK SERVATIUS GERTRUDA, VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS, LENDERINK EGBERT, NIKIPELOV ANDREY, RISPENS GIJSBERT, JANSSEN PAUL, ABEGG ERIK ACHILLES, VLES DAVID FERDINAND, VOORTHUIJZEN WILLEM PIETER, KRUIZINGA MATTHIAS, VAN ZWOL PIETER JAN, PILIEGO CLAUDIA, VAN DER ZANDE WILLEM JOAN, SCHUH NADJA, MAXIM NICOLAE, NOTENBOOM ARNOUD WILLEM
Year of Publication 16.02.2023
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Year of Publication 16.02.2023
Patent
EUV Membrane for EUV lithography
PETER MARIA, NASALEVICH MAXIM ALEKSANDROVICH, VAN DE KERKHOF MARCUS ADRIANUS, BANERJEE NIRUPAM, ZDRAVKOV ALEXANDAR NIKOLOV, VERBURG ANTONIUS WILLEM, BLAUW MICHIEL ALEXANDER, BROUNS DERK SERVATIUS GERTRUDA, VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS, LENDERINK EGBERT, NIKIPELOV ANDREY, RISPENS GIJSBERT, JANSSEN PAUL, ABEGG ERIK ACHILLES, VLES DAVID FERDINAND, VOORTHUIJZEN WILLEM PIETER, KRUIZINGA MATTHIAS, VAN ZWOL PIETER JAN, PILIEGO CLAUDIA, VAN DER ZANDE WILLEM JOAN, SCHUH NADJA, MAXIM NICOLAE, NOTENBOOM ARNOUD WILLEM
Year of Publication 24.12.2021
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Year of Publication 24.12.2021
Patent
EUV 리소그래피를 위한 멤브레인
PETER MARIA, NASALEVICH MAXIM ALEKSANDROVICH, VAN DE KERKHOF MARCUS ADRIANUS, BANERJEE NIRUPAM, ZDRAVKOV ALEXANDAR NIKOLOV, VERBURG ANTONIUS WILLEM, BLAUW MICHIEL ALEXANDER, BROUNS DERK SERVATIUS GERTRUDA, VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS, LENDERINK EGBERT, NIKIPELOV ANDREY, RISPENS GIJSBERT, JANSSEN PAUL, ABEGG ERIK ACHILLES, VLES DAVID FERDINAND, VOORTHUIJZEN WILLEM PIETER, KRUIZINGA MATTHIAS, VAN ZWOL PIETER JAN, PILIEGO CLAUDIA, VAN DER ZANDE WILLEM JOAN, SCHUH NADJA, MAXIM NICOLAE, NOTENBOOM ARNOUD WILLEM
Year of Publication 20.12.2018
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Year of Publication 20.12.2018
Patent
Synthesis and Characterization of Microporous Fe−Si−O Materials with Tailored Iron Content from Silsesquioxane Precursors
Maxim, Nicolae, Overweg, Arian, Kooyman, Patricia J, van Wolput, Jos H. M. C, Hanssen, Rob W. J. M, van Santen, Rutger A, Abbenhuis, Hendrikus C. L
Published in The journal of physical chemistry. B (07.03.2002)
Published in The journal of physical chemistry. B (07.03.2002)
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Journal Article
Membrane for EUV lithography
Van Der Zande, Willem Joan, Péter, Mária, Blauw, Michiel Alexander, Janssen, Paul, Voorthuijzen, Willem-Pieter, Verburg, Antonius Willem, Vermeulen, Johannes Petrus Martinus Bernardus, Zdravkov, Aleksandar Nikolov, Abegg, Erik Achilles, Brouns, Derk Servatius Gertruda, Maxim, Nicolae, Schuh, Nadja, Nikipelov, Andrey, Van Zwol, Pieter-Jan, Van De Kerkhof, Marcus Adrianus, Kruizinga, Matthias, Lenderink, Egbert, Banerjee, Nirupam, Rispens, Gijsbert, Nasalevich, Maxim Aleksandrovich, Piliego, Claudia, Vles, David Ferdinand, Notenboom, Arnoud Willem
Year of Publication 19.09.2023
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Year of Publication 19.09.2023
Patent
MEMBRANE FOR EUV LITHOGRAPHY
ZDRAVKOV, Aleksandar Nikolov, NIKIPELOV, Andrey, JANSSEN, Paul, Gertruda BROUNS, Derk Servatius, NOTENBOOM, Arnoud Willem, Bernardus VERMEULEN, Johannes Petrus Martinus, PÉTER, Mária, MAXIM, Nicolae, VAN DER ZANDE, Willem Joan, BANERJEE, Nirupam, LENDERINK, Egbert, KRUIZINGA, Matthias, PILIEGO, Claudia, VERBURG, Antonius Willem, ABEGG, Erik Achilles, SCHUH, Nadja, VLES, David Ferdinand, BLAUW, Michiel Alexander, VAN ZWOL, Pieter-Jan, Nasalevich, Maxim Aleksandrovich, VAN DE KERKHOF, Marcus Adrianus, RISPENS, Gijsbert, VOORTHUIJZEN, Willem-Pieter
Year of Publication 04.01.2024
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Year of Publication 04.01.2024
Patent
A MEMBRANE FOR EUV LITHOGRAPHY
VAN DER ZANDE, Willem, Joan, NIKIPELOV, Andrey, VLES, David, Ferdinand, JANSSEN, Paul, NASALEVICH, Maxim, Aleksandrovich, BROUNS, Derk, Servatius, Gertruda, PÉTER, Mária, VERMEULEN, Johannes, Petrus, Martinus, Bernardus, VERBURG, Antonius, Willem, MAXIM, Nicolae, ABEGG, Erik, Achilles, BANERJEE, Nirupam, LENDERINK, Egbert, ZDRAVKOV, Alexandar, Nikolov, KRUIZINGA, Matthias, PILIEGO, Claudia, NOTENBOOM, Arnoud, Willem, SCHUH, Nadja, BLAUW, Michiel, Alexander, VAN ZWOL, Pieter-Jan, VAN DE KERKHOF, Marcus, Adrianus, VOORTHUIJZEN, Willem-Pieter, RISPENS, Gijsbert
Year of Publication 28.06.2023
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Year of Publication 28.06.2023
Patent
A MEMBRANE FOR EUV LITHOGRAPHY
VAN DER ZANDE, Willem, Joan, NIKIPELOV, Andrey, VLES, David, Ferdinand, JANSSEN, Paul, NASALEVICH, Maxim, Aleksandrovich, BROUNS, Derk, Servatius, Gertruda, PÉTER, Mária, VERMEULEN, Johannes, Petrus, Martinus, Bernardus, MAXIM, Nicolae, VERBURG, Antonius, Willem, ABEGG, Erik, Achilles, BANERJEE, Nirupam, LENDERINK, Egbert, ZDRAVKOV, Alexandar, Nikolov, KRUIZINGA, Matthias, PILIEGO, Claudia, NOTENBOOM, Arnoud, Willem, BLAUW, Michiel, Alexander, SCHUH, Nadja, VAN ZWOL, Pieter-Jan, VAN DE KERKHOF, Marcus, Adrianus, RISPENS, Gijsbert, VOORTHUIJZEN, Willem-Pieter
Year of Publication 31.05.2023
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Year of Publication 31.05.2023
Patent
MEMBRANE FOR EUV LITHOGRAPHY
Van Der Zande, Willem Joan, Péter, Mária, Blauw, Michiel Alexander, Janssen, Paul, Voorthuijzen, Willem-Pieter, Verburg, Antonius Willem, Vermeulen, Johannes Petrus Martinus Bernardus, Zdravkov, Aleksandar Nikolov, Abegg, Erik Achilles, Brouns, Derk Servatius Gertruda, Maxim, Nicolae, Schuh, Nadja, Nikipelov, Andrey, Van Zwol, Pieter-Jan, Van De Kerkhof, Marcus Adrianus, Kruizinga, Matthias, Lenderink, Egbert, Banerjee, Nirupam, Rispens, Gijsbert, Nasalevich, Maxim Aleksandrovich, Piliego, Claudia, Vles, David Ferdinand, Notenboom, Arnoud Willem
Year of Publication 15.04.2021
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Year of Publication 15.04.2021
Patent
Membrane for EUV lithography
Van Der Zande, Willem Joan, Péter, Mária, Blauw, Michiel Alexander, Janssen, Paul, Voorthuijzen, Willem-Pieter, Verburg, Antonius Willem, Vermeulen, Johannes Petrus Martinus Bernardus, Zdravkov, Aleksandar Nikolov, Abegg, Erik Achilles, Brouns, Derk Servatius Gertruda, Maxim, Nicolae, Schuh, Nadja, Nikipelov, Andrey, Van Zwol, Pieter-Jan, Van De Kerkhof, Marcus Adrianus, Kruizinga, Matthias, Lenderink, Egbert, Banerjee, Nirupam, Rispens, Gijsbert, Nasalevich, Maxim Aleksandrovich, Piliego, Claudia, Vles, David Ferdinand, Notenboom, Arnoud Willem
Year of Publication 02.02.2021
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Year of Publication 02.02.2021
Patent
A MEMBRANE FOR EUV LITHOGRAPHY
PIETER-JAN VAN ZWOL, WILLEM JOAN VAN DER ZANDE, MICHIEL ALEXANDER BLAUW, ANTONIUS WILLEM VERBURG, DAVID FERDINAND VLES, EGBERT LENDERINK, PAUL JANSSEN, ERIK ACHILLES ABEGG, MATTHIAS KRUIZINGA, ARNOUD WILLEM NOTENBOOM, NIRUPAM BANERJEE, NICOLAE MAXIM, NADJA SCHUH, GIJSBERT RISPENS, JOHANNES PETRUS MARTINUS BERNARDUS VERMEULEN, MAXIM ALEKSANDROVICH NASALEVICH, DERK SERVATIUS GERTRUDA BROUNS, MARCUS ADRIANUS VAN DE KERKHOF, MÁRIA PÉTER, ALEXANDAR NIKOLOV ZDRAVKOV, WILLEM-PIETER VOORTHUIJZEN, ANDREY NIKIPELOV, CLAUDIA PILIEGO
Year of Publication 19.08.2020
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Year of Publication 19.08.2020
Patent
Synthesis and characterisation of microporous bimetallic Fe-Cr-Si-O materials derived from silsesquioxane precursors
MAXIM, Nicolae, OVERWEG, Arian, KOOYMAN, Patricia J, NAGY, Anton, VAN SANTEN, Rutger A, ABBENHUIS, Hendrikus C. L
Published in Journal of materials chemistry (01.01.2002)
Published in Journal of materials chemistry (01.01.2002)
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Journal Article
A MEMBRANE FOR EUV LITHOGRAPHY
PIETER-JAN VAN ZWOL, WILLEM JOAN VAN DER ZANDE, MICHIEL ALEXANDER BLAUW, ANTONIUS WILLEM VERBURG, DAVID FERDINAND VLES, EGBERT LENDERINK, PAUL JANSSEN, ERIK ACHILLES ABEGG, MATTHIAS KRUIZINGA, ARNOUD WILLEM NOTENBOOM, NIRUPAM BANERJEE, NICOLAE MAXIM, NADJA SCHUH, GIJSBERT RISPENS, JOHANNES PETRUS MARTINUS BERNARDUS VERMEULEN, MAXIM ALEKSANDROVICH NASALEVICH, DERK SERVATIUS GERTRUDA BROUNS, MARCUS ADRIANUS VAN DE KERKHOF, MÁRIA PÉTER, ALEXANDAR NIKOLOV ZDRAVKOV, WILLEM-PIETER VOORTHUIJZEN, ANDREY NIKIPELOV, CLAUDIA PILIEGO
Year of Publication 16.12.2019
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Year of Publication 16.12.2019
Patent
A MEMBRANE FOR EUV LITHOGRAPHY
PIETER-JAN VAN ZWOL, WILLEM JOAN VAN DER ZANDE, MICHIEL ALEXANDER BLAUW, ANTONIUS WILLEM VERBURG, DAVID FERDINAND VLES, EGBERT LENDERINK, PAUL JANSSEN, ERIK ACHILLES ABEGG, MATTHIAS KRUIZINGA, ARNOUD WILLEM NOTENBOOM, NIRUPAM BANERJEE, NICOLAE MAXIM, NADJA SCHUH, GIJSBERT RISPENS, JOHANNES PETRUS MARTINUS BERNARDUS VERMEULEN, ALEXANDER NIKOLOV ZDRAVKOV, MAXIM ALEKSANDROVICH NASALEVICH, DERK SERVATIUS GERTRUDA BROUNS, MARCUS ADRIANUS VAN DE KERKHOF, MÁRIA PÉTER, WILLEM-PIETER VOORTHUIJZEN, ANDREY NIKIPELOV, CLAUDIA PILIEGO
Year of Publication 07.11.2019
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Year of Publication 07.11.2019
Patent
A membrane for EUV lithography
MAXIM, NICOLAE, VOORTHUIJZEN, WILLEM-PIETER, SCHUH, NADJA, BANERJEE, NIRUPAM, RISPENS, GIJSBERT, VAN DER ZANDE, WILLEM JOAN, VERMEULEN, JOHANNES PETRUS MARTINUS BERNARDUS, LENDERINK, EGBERT, VAN ZWOL, PIETER-JAN, NIKIPELOV, ANDREY, VERBURG, ANTONIUS WILLEM, KRUIZINGA, MATTHIAS, VLES, DAVID FERDINAND, VAN DE KERKHOF, MARCUS ADRIANUS, ABEGG, ERIK ACHILLES, NASALEVICH, MAXIM ALEKSANDROVICH, BLAUW, MICHIEL ALEXANDER, BROUNS, DERK SERVATIUS GERTRUDA, NOTENBOOM, ARNOUD WILLEM, PETER, MARIA, JANSSEN, PAUL, PILIEGO, CLAUDIA, ZDRAVKOV, ALEKSANDAR NIKOLOV
Year of Publication 16.06.2024
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Year of Publication 16.06.2024
Patent
Membrane, pellicle assembly, patterning device assembly and dynamic gas lock assembly for euv lithography
MAXIM, NICOLAE, VOORTHUIJZEN, WILLEM-PIETER, SCHUH, NADJA, BANERJEE, NIRUPAM, RISPENS, GIJSBERT, VAN DER ZANDE, WILLEM JOAN, VERMEULEN, JOHANNES PETRUS MARTINUS BERNARDUS, LENDERINK, EGBERT, VAN ZWOL, PIETER-JAN, NIKIPELOV, ANDREY, VERBURG, ANTONIUS WILLEM, KRUIZINGA, MATTHIAS, VLES, DAVID FERDINAND, VAN DE KERKHOF, MARCUS ADRIANUS, ABEGG, ERIK ACHILLES, NASALEVICH, MAXIM ALEKSANDROVICH, BLAUW, MICHIEL ALEXANDER, BROUNS, DERK SERVATIUS GERTRUDA, NOTENBOOM, ARNOUD WILLEM, PETER, MARIA, JANSSEN, PAUL, PILIEGO, CLAUDIA, ZDRAVKOV, ALEKSANDAR NIKOLOV
Year of Publication 11.03.2024
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Year of Publication 11.03.2024
Patent
A MEMBRANE FOR EUV LITHOGRAPHY
ZDRAVICOV, Aleksandar Nikolov, NIKIPELOV, Andrey, JANSSEN, Paul, NOTENBOOM, Arnoud Willem, PÉTER, Mária, MAXIM, Nicolae, VAN DER ZANDE, Willem Joan, BANERJEE, Nirupam, LENDERINK, Egbert, RISPENS, Gijsber, KRUIZINGA, Matthias, PILIEGO, Claudia, VERBURG, Antonius Willem, NASALEVICH, Maxim Aleksandrovich, ABEGG, Erik Achilles, SCHUH, Nadja, VLES, David Ferdinand, BLAUW, Michiel Alexander, VAN ZWOL, Pieter-Jan, VERMEULEN, Johannes Petrus Martinus Bernardus, VAN DE KERKHOF, Marcus Adrianus, VOORTHUIJZEN, Willem-Pieter, BROUNS, Derk Servatius Gertruda
Year of Publication 02.05.2019
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Year of Publication 02.05.2019
Patent