SUBSTRATE PROVIDED WITH A STACK HAVING THERMAL PROPERTIES COMPRISING AT LEAST ONE LAYER COMPRISING SILICON-ZIRCONIUM NITRIDE ENRICHED IN ZIRCONIUM, ITS USE AND ITS MANUFACTURE
CAILLET, Xavier, BILLIERES, Dominique, ORVEN, Matthieu, MERCADIER, Nicolas
Year of Publication 18.07.2019
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Year of Publication 18.07.2019
Patent