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"MATSUNAMI TORU"
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"MATSUNAMI TORU"
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METHOD FOR PRODUCING SIC EPITAXIAL SUBSTRATE
by
MATSUNAMI
,
TORU
,
NISHIKAWA, KIMITO
,
NAKAMURA, NOBUHIKO
Year of Publication
16.06.2010
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SIC EPITAXIAL SUBSTRATE AND METHOD FOR PRODUCING THE SAME
by
NAKAMURA NOBUHIKO
,
MATSUNAMI TORU
,
NISHIKAWA KIMITO
Year of Publication
13.05.2010
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SUBSTRATE TREATING DEVICE
by
MATSUNAMI TORU
Year of Publication
20.03.1995
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METHOD FOR FORMING SiC SINGLE CRYSTAL
by
MATSUNAMI TORU
,
HAMADA NOBUYOSHI
,
NISHIKAWA KIMITO
Year of Publication
22.04.2010
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METHOD FOR MANUFACTURING SINGLE CRYSTAL SiC FILM
by
NAKAMURA NOBUHIKO
,
MATSUNAMI TORU
,
NISHIKAWA KIMITO
Year of Publication
16.07.2009
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Method for fabricating SIC substrate
by
HAMADA SHINKICHI
,
NAKAMURA NOBUHIKO
,
MATSUNAMI TORU
Year of Publication
18.06.2014
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THIN FILM VAPOR PHASE GROWTH METHOD
by
KUBOTA KIYOSHI
,
MATSUNAMI TORU
Year of Publication
07.06.1996
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THIN FILM VAPOR GROWTH EQUIPMENT
by
KUBOTA KIYOSHI
,
MATSUNAMI TORU
Year of Publication
31.05.1996
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METHOD FOR FABRICATING SiC SUBSTRATE
by
HAMADA SHINKICHI
,
NAKAMURA NOBUHIKO
,
MATSUNAMI TORU
Year of Publication
11.04.2012
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PLASMA TREATMENT APPARATUS
by
NAKAHIGASHI TAKAHIRO
,
MATSUNAMI TORU
Year of Publication
05.11.1992
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CHEMICAL VAPOR GROWTH APPARATUS
by
MATSUNAMI TORU
,
NISHIKAWA KIMITO
,
OYAGI SHIGEKI
Year of Publication
05.03.1996
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CHEMICAL VAPOR GROWTH APPARATUS
by
MATSUNAMI TORU
,
NISHIKAWA KIMITO
,
OYAGI SHIGEKI
Year of Publication
05.03.1996
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CHEMICAL VAPOR GROWTH APPARATUS
by
MATSUNAMI TORU
,
NISHIKAWA KIMITO
,
OYAGI SHIGEKI
Year of Publication
05.03.1996
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INNER PIPE FIXING JIG FOR VAPOR PHASE EPITAXIAL GROWTH SYSTEM
by
KUBOTA KIYOSHI
,
MATSUNAMI TORU
,
OYAGI SHIGEKI
Year of Publication
02.06.1995
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THIN FILM DEPOSITION DEVICE, AND ITS OPERATING METHOD
by
HAYASHI TSUKASA
,
AMAMIYA TORU
,
MATSUNAMI TORU
,
NISHIKAWA KIMITO
Year of Publication
11.07.2000
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MAINTENANCE METHOD OF VAPORIZER
by
HAYASHI TSUKASA
,
AMAMIYA TORU
,
MATSUNAMI TORU
,
NISHIKAWA KIMITO
Year of Publication
11.07.2000
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